Energetic ion beams with diverse energies, species and beam dimensions have been
extensively utilized to modify the properties of materials to achieve versatile applications in …

Ingenious techniques are needed to extend group IV photonics from near-infrared to mid-
infrared wavelengths. If achieved, the reward could be on-chip CMOS optoelectronic …

Silicon-on-insulator (SOI) has been used as a platform for near-infrared photonic devices for
more than twenty years. Longer wavelengths, however, may be problematic for SOI due to …

A process for fabricating arbitrary-shaped, two-and three-dimensional silicon and porous
silicon components has been developed, based on high-energy ion irradiation, such as 250 …

We have developed a process to fabricate arbitrary-shaped, three-dimensional
microstructures in 0.4 Ω cm p-type silicon using focused high-energy proton beam …

The present investigation reports the optical characteristics of the porous Si (PSi) based
microcavities before and after energetic He+ and H+ ion irradiations. These PSi …

We have studied the effect of oxidation on the propagation loss and surface roughness of
silicon-on-oxidized-porous-silicon strip waveguides fabricated using proton-beam irradiation …

Addressing the growing demand for larger capacity in information technology, VLSI Micro-
and Nanophotonics: Science, Technology, and Applications explores issues of science and …

We report that low-loss ridge waveguides are directly written on nanoporous silicon layers
by using an argon-ion laser at 514 nm up to 100 mW. Optical characterization of the …

Proton beam writing is a high-resolution direct write lithographic technique capable of
producing three dimensional, high aspect ratio structures with smooth and vertical sidewalls …