Review of piezoelectric micromachined ultrasonic transducers for rangefinders

J Pan, C Bai, Q Zheng, H Xie - Micromachines, 2023 - mdpi.com
Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …

Development of dual-frequency PMUT arrays based on thin ceramic PZT for endoscopic photoacoustic imaging

H Wang, H Yang, Z Chen, Q Zheng… - Journal of …, 2021 - ieeexplore.ieee.org
This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer
(pMUT) array based on thin ceramic PZT for endoscopic photoacoustic imaging (PAI) …

Modeling and experimental studies of mutual acoustic radiation effect on PMUT array

L Zhao, J Xia, C Yang, Y Lu - Sensors and Actuators A: Physical, 2024 - Elsevier
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely used for ultrasound
imaging and sensing applications that require broad bandwidth. A single PMUT is normally …

[HTML][HTML] Suppression of crosstalk in row–column actuator array using regulation of ferroelectric polarization

JS Park, SY Jung, DH Kim, JH Park, HW Jang… - Applied Materials …, 2023 - Elsevier
This article presents a method for suppressing electrical crosstalk in a ferroelectric row-
column (RC) actuator array. In high-density two-dimensional (2D) arrays, the RC addressing …

Lumped-parameter equivalent circuit modeling of CMUT array elements

T Merrien, A Boulmé, D Certon - IEEE Open Journal of …, 2021 - ieeexplore.ieee.org
Design and modeling are key steps in the value chain of Capacitive Micromachined
Ultrasonic Transducer (CMUT) arrays. Although CMUT array element models are very …

Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer

T Xu, L Zhao, Z Jiang, S Guo, Z Li… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
This article presents a design of resonant cavity-based piezoelectric micromachined
ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and …

Dual-frequency piezoelectric micromachined ultrasonic transducers via beam-membrane coupled structure

X Chen, M Qu, K Zhu, J Xie - IEEE Electron Device Letters, 2021 - ieeexplore.ieee.org
Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive
for ultrasonic imaging, which can meet the requirements of large detection depth and high …

Equivalent circuit model for a large array of coupled piezoelectric micromachined ultrasonic transducers with high emission performance

T Xu, L Zhao, Z Jiang, S Guo, Z Li… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
In this article, an analytical equivalent circuit model is established for the piezoelectric
micromachined ultrasonic transducer (PMUT) cell and array with a combination of the …

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

OMO Abdalla, G Massimino, C D'Argenzio… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
This study provides a comprehensive characterization of a 4 4 piezoelectric micromachined
ultrasonic transducer (PMUT) array suited for in-air applications. Crosstalk can be viewed as …

Multi-frequency broadband piezoelectric micromachined ultrasonic transducer utilizing helmholtz resonance

Z Wang, H Duan, Y Zheng - International Journal of Mechanical Sciences, 2023 - Elsevier
Piezoelectric micromachined ultrasonic transducers (PMUTs) with multi-frequency are
appealing for ultrasonic applications, which can meet the requirements of large detection …