Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by sawtooth voltage waveforms
The ionization dynamics in geometrically symmetric parallel plate capacitively coupled
plasmas driven by radio frequency tailored voltage waveforms is investigated using phase …
plasmas driven by radio frequency tailored voltage waveforms is investigated using phase …
Ultrathin epitaxial silicon solar cells with inverted nanopyramid arrays for efficient light trapping
Ultrathin c-Si solar cells have the potential to drastically reduce costs by saving raw material
while maintaining good efficiencies thanks to the excellent quality of monocrystalline silicon …
while maintaining good efficiencies thanks to the excellent quality of monocrystalline silicon …
Ultrathin PECVD epitaxial Si solar cells on glass via low‐temperature transfer process
Fabrication of high‐quality ultrathin monocrystalline silicon layers and their transfer to low‐
cost substrates are key steps for flexible electronics and photovoltaics. In this work, we …
cost substrates are key steps for flexible electronics and photovoltaics. In this work, we …
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
Through the use of particle-in-cell simulations, we study the ion flux asymmetry in an argon
discharge that is induced by a'sawtooth-like'excitation voltage waveform. In a previous …
discharge that is induced by a'sawtooth-like'excitation voltage waveform. In a previous …
Low temperature plasma enhanced CVD epitaxial growth of silicon on GaAs: a new paradigm for III-V/Si integration
The integration of III-V semiconductors with silicon is a key issue for photonics,
microelectronics and photovoltaics. With the standard approach, namely the epitaxial growth …
microelectronics and photovoltaics. With the standard approach, namely the epitaxial growth …
[HTML][HTML] Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas
J Wang, S Diné, JP Booth, EV Johnson - Journal of Vacuum Science & …, 2019 - pubs.aip.org
Driving radiofrequency capacitively coupled plasmas by multiharmonic tailored voltage
waveforms (TVWs) has been shown to allow considerable control over various plasma …
waveforms (TVWs) has been shown to allow considerable control over various plasma …
Influence of deposition rate on the structural properties of plasma-enhanced CVD epitaxial silicon
Solar cells based on epitaxial silicon layers as the absorber attract increasing attention
because of the potential cost reduction. In this work, we studied the influence of the …
because of the potential cost reduction. In this work, we studied the influence of the …
Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
In this paper, we investigate the excitation of a capacitively coupled plasma using a non-
sinusoidal voltage waveform whose amplitude-and slope-asymmetry varies continuously …
sinusoidal voltage waveform whose amplitude-and slope-asymmetry varies continuously …
Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
We report investigations of capacitively coupled carbon tetrafluoride (CF 4) plasmas excited
with tailored voltage waveforms containing up to five harmonics of a base frequency of 5.5 …
with tailored voltage waveforms containing up to five harmonics of a base frequency of 5.5 …
Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry
Parallel plate capacitively coupled plasmas in hydrogen at relatively high pressure (~ 1 Torr)
are excited with tailored voltage waveforms containing up to five frequencies. Predictions of …
are excited with tailored voltage waveforms containing up to five frequencies. Predictions of …