Amorphous carbon films for electronic applications
While various crystalline carbon allotropes, including graphene, have been actively
investigated, amorphous carbon (a‐C) thin films have received relatively little attention. The …
investigated, amorphous carbon (a‐C) thin films have received relatively little attention. The …
Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties
Boron-doped amorphous carbon (aC) films have been investigated as a hardmask material
for improving semiconductor integration, deposited using direct current (DC) magnetron …
for improving semiconductor integration, deposited using direct current (DC) magnetron …
[HTML][HTML] Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system
The importance of developing a hardmask with excellent performance, and physical and
chemical properties to utilize in long-term etching is spotlighted due to the acceleration of …
chemical properties to utilize in long-term etching is spotlighted due to the acceleration of …
Bonding structure and dry etching characteristics in amorphous B–C–N films for hardmask applications
The etch selectivity of the hardmask layer in lithography process for semiconductor chip
manufacturing is being continually improved through the utilization of single-element …
manufacturing is being continually improved through the utilization of single-element …
[HTML][HTML] First principles investigation on energetics, structure, and mechanical properties of amorphous carbon films doped with B, N, and Cl
Amorphous carbon (aC) films have received significant attention due to their reliable
structures and superior mechanical, chemical and electronic properties, making them a …
structures and superior mechanical, chemical and electronic properties, making them a …
[HTML][HTML] Analysis of surface adsorption kinetics of SiH4 and Si2H6 for deposition of a hydrogenated silicon thin film using intermediate pressure SiH4 plasmas
For the future mass production of silicon-based devices, the deposition process of
hydrogenated silicon (Si: H) thin films must not only satisfy several important material …
hydrogenated silicon (Si: H) thin films must not only satisfy several important material …
Effect of N doping on Cr-doped amorphous carbon/CrN/Ti multilayer coatings on 316L stainless steel bipolar plate for PEMFC: First principles calculation, structure …
To improve the corrosion resistance and interfacial contact resistance (ICR) 316L stainless
steel bipolar plates used in proton exchange membrane fuel cells (PEMFCs), a series of …
steel bipolar plates used in proton exchange membrane fuel cells (PEMFCs), a series of …
First-principles investigation of morphological evolution of tungsten growth on alumina surfaces: implications for thin-film growth
H Park, DH Han, HT Lim, W Choi… - ACS Applied Nano …, 2022 - ACS Publications
The fundamentals and interfacial interaction mechanism of tungsten-alumina
heterostructures are not yet fully understood. Here, we present a first-principles investigation …
heterostructures are not yet fully understood. Here, we present a first-principles investigation …
[HTML][HTML] The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and ab …
Amorphous carbon (aC) films have attracted significant attention due to their reliable
structures and superior mechanical, chemical and electronic properties, making them a …
structures and superior mechanical, chemical and electronic properties, making them a …
Understanding the CO2/CH4/N2 Separation Performance of Nanoporous Amorphous N‐Doped Carbon Combined Hybrid Monte Carlo with Machine Learning
Amorphous carbon (aC) is widely used as the adsorbent in the purification of industrial gas.
Introducing nitrogen dopant can regulate the morphology and improve the adsorption …
Introducing nitrogen dopant can regulate the morphology and improve the adsorption …