High-K materials and metal gates for CMOS applications

J Robertson, RM Wallace - Materials Science and Engineering: R: Reports, 2015 - Elsevier
The scaling of complementary metal oxide semiconductor (CMOS) transistors has led to the
silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current …

High-k Organic, Inorganic, and Hybrid Dielectrics for Low-Voltage Organic Field-Effect Transistors

RP Ortiz, A Facchetti, TJ Marks - Chemical reviews, 2010 - ACS Publications
The search for high dielectric constant (high-k) gate dielectric materials for field-effect
transistor-enabled (FET) applications has stimulated important research activities in both …

Noise and Defects in Microelectronic Materials and Devices

DM Fleetwood - IEEE Transactions on Nuclear Science, 2015 - ieeexplore.ieee.org
This paper reviews and compares predictions of the Dutta-Horn model of low-frequency
excess (1/f) noise with experimental results for thin metal films, MOS transistors, and …

Germanium based field-effect transistors: Challenges and opportunities

PS Goley, MK Hudait - Materials, 2014 - mdpi.com
The performance of strained silicon (Si) as the channel material for today's metal-oxide-
semiconductor field-effect transistors may be reaching a plateau. New channel materials …

Germanium surface passivation and atomic layer deposition of high-k dielectrics—a tutorial review on Ge-based MOS capacitors

Q Xie, S Deng, M Schaekers, D Lin… - Semiconductor …, 2012 - iopscience.iop.org
Due to its high intrinsic mobility, germanium (Ge) is a promising candidate as a channel
material (offering a mobility gain of approximately× 2 for electrons and× 4 for holes when …

[图书][B] Metrology and Diagnostic Techniques for Nanoelectronics

Z Ma, DG Seiler - 2017 - taylorfrancis.com
Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

[HTML][HTML] Atomic layer deposition of crystalline SrHfO3 directly on Ge (001) for high-k dielectric applications

MD McDaniel, C Hu, S Lu, TQ Ngo, A Posadas… - Journal of applied …, 2015 - pubs.aip.org
The current work explores the crystalline perovskite oxide, strontium hafnate, as a potential
high-k gate dielectric for Ge-based transistors. SrHfO 3 (SHO) is grown directly on Ge by …

[HTML][HTML] Surface passivation approaches for silicon, germanium, and III–V semiconductors

RJ Theeuwes, WMM Kessels, B Macco - Journal of Vacuum Science & …, 2024 - pubs.aip.org
Semiconductors are key to our modern society, enabling a myriad of fields, including
electronics, photovoltaics, and photonics. The performance of semiconductor devices can be …

Band‐Gap Engineering at a Semiconductor–Crystalline Oxide Interface

M Jahangir‐Moghadam… - Advanced Materials …, 2015 - Wiley Online Library
The epitaxial growth of crystalline oxides on semiconductors provides a pathway to
introduce new functionalities to semiconductor devices. Key to electrically coupling …

A chemical route to monolithic integration of crystalline oxides on semiconductors

MD McDaniel, TQ Ngo, A Posadas, C Hu… - Advanced Materials …, 2014 - Wiley Online Library
This work demonstrates the growth of crystalline SrTiO3 (STO) directly on germanium via a
chemical method. After thermal deoxidation, the Ge substrate is transferred in vacuo to the …