MEMS-based thermoelectric infrared sensors: A review
D Xu, Y Wang, B Xiong, T Li - Frontiers of Mechanical Engineering, 2017 - Springer
In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared
(IR) sensors have received considerable attention because of the advances in …
(IR) sensors have received considerable attention because of the advances in …
CMOS MEMS thermoelectric infrared sensor with plasmonic metamaterial absorber for selective wavelength absorption and responsivity enhancement
This study demonstrates the integration of thermoelectric type MEMS infrared (IR) sensor
with plasmonic metamaterial absorber (PMA) through a standard CMOS process platform to …
with plasmonic metamaterial absorber (PMA) through a standard CMOS process platform to …
Integration and characterization of LiTaO₃ single crystal film pyroelectric sensor using mid-infrared metamaterial perfect absorber
K Zhang, W Luo, X Zeng, S Huang, Q Xie… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
An infrared sensor with Au/SiO 2/Au metamaterial perfect absorber (MPA) structure and
Crystal ion slicing (CIS) fabricated LiTaO 3 single crystal film to realize wavelength-selective …
Crystal ion slicing (CIS) fabricated LiTaO 3 single crystal film to realize wavelength-selective …
Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process
H Zhou, P Kropelnicki, JM Tsai… - … of Micromechanics and …, 2013 - iopscience.iop.org
A stacked double-layer (SDL) thermopile-based infrared sensor, which comprised of 96
thermocouples on a suspended membrane, has been designed and fabricated with a CMOS …
thermocouples on a suspended membrane, has been designed and fabricated with a CMOS …
Wavelength-selective infrared detector fabricated by integrating LiTaO3 with a metamaterial perfect absorber
K Zhang, W Luo, S Huang, X Bai, Y Shuai… - Sensors and Actuators A …, 2020 - Elsevier
Pyroelectric infrared detectors are widely used owing to their uncooling characteristic and
full infrared spectrum response. However, the increased volume and complex fabrication …
full infrared spectrum response. However, the increased volume and complex fabrication …
CMOS compatible midinfrared wavelength-selective thermopile for high temperature applications
H Zhou, P Kropelnicki, C Lee - Journal of …, 2014 - ieeexplore.ieee.org
In this paper, the design, fabrication, and testing of a CMOS compatible mid-infrared (mid-IR)
thermopile sensor comprising a stacked double layer thermopile and an interferometric …
thermopile sensor comprising a stacked double layer thermopile and an interferometric …
Quick response PZT/P (VDF-TrFE) composite film pyroelectric infrared sensor with patterned polyimide thermal isolation layer
CG Wu, P Li, GQ Cai, WB Luo, XY Sun, QX Peng… - Infrared Physics & …, 2014 - Elsevier
The fabrication method and the pyroelectric response of a single element infrared sensor
based lead zirconate titanate (PZT) particles and polyvinylidene fluoride P (VDF-TrFE) …
based lead zirconate titanate (PZT) particles and polyvinylidene fluoride P (VDF-TrFE) …
Uncooled resonant infrared detector based on aluminum nitride piezoelectric film through charge generations and lattice absorptions
WC Ang, P Kropelnicki, Y Zhu, AB Randles… - Applied Physics …, 2014 - pubs.aip.org
This Letter demonstrates an aluminum nitride (AlN) based uncooled resonant infrared (IR)
detector utilizing the photo-sensitive and piezoelectric properties of polycrystalline AlN. The …
detector utilizing the photo-sensitive and piezoelectric properties of polycrystalline AlN. The …
100-μm-scale high-detectivity infrared detector with thermopile/absorber double-deck structure formed in (111) silicon
D Xue, W Zhou, H Zhang, Z Ni, W Li… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
This article presents a 96 106 sized single-crystalline silicon (SC-Si)/Au thermopile infrared
(IR) detector, with the thermopile and IR absorber located at different layers of a double-deck …
(IR) detector, with the thermopile and IR absorber located at different layers of a double-deck …
ALN-based piezoelectric resonator for infrared sensing application
WC Ang, P Kropelnicki, H Campanella… - 2014 IEEE 27th …, 2014 - ieeexplore.ieee.org
This paper reports a highly sensitive aluminum nitride (AlN) based resonant uncooled
infrared (IR) detector utilizing photo-sensitive and piezoelectric properties of polycrystalline …
infrared (IR) detector utilizing photo-sensitive and piezoelectric properties of polycrystalline …