Temperature dependence modeling and thermal sensitivity reduction of bulk micromachined silicon MEMS lame resonators
AR Kolahdouz-Moghaddam, S Nabavi… - Journal of …, 2023 - ieeexplore.ieee.org
The elastic properties of structural materials considerably influence the resonant frequency
of silicon MEMS resonators and their sensitivity to temperature variations. This work studies …
of silicon MEMS resonators and their sensitivity to temperature variations. This work studies …
[HTML][HTML] Mechanical vibration-induced suppression of transverse acoustic phonons in silicon due to Akhiezer damping
JS Jin - AIP Advances, 2024 - pubs.aip.org
Thermoelectric modules that utilize waste heat from machinery are inevitably exposed to
mechanical vibrations. Here, we investigated the effects of mechanically induced phonon …
mechanical vibrations. Here, we investigated the effects of mechanically induced phonon …