Diffraction gratings were discovered during the 18th century, and they are now widely used
in spectrometry analysis, with outstanding achievements spanning from the probing of single …

Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

To improve the lateral resolution in microscopic imaging, microspheres are placed close to
the object's surface in order to support the imaging process by optical near-field information …

Since the 80's, specialists of gratings can rely on very powerful grating softwares [1-6].
These softwares are able to compute grating efficiencies for almost any kind of grating in any …

A quasimodal expansion method (QMEM) is developed to model and understand the
scattering properties of arbitrary shaped two-dimensional open structures. In contrast with …

Despite the fact that optical profilers, such as coherence scanning interferometers, are
frequently used for fast and contactless topography measurements in various fields of …

摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …

An edge element adaptive strategy with error control is developed for wave scattering by
biperiodic structures. The unbounded computational domain is truncated to a bounded one …

In this paper, we consider the time-dependent Maxwell's equations when Cole–Cole
dispersive medium is involved. The Cole–Cole model contains a fractional time derivative …

The main goal of the method proposed in this paper is the numerical study of various kinds
of anisotropic gratings deposited on isotropic substrates, without any constraint upon the …