GOIR 27/26(2006.01)(57) ABSTRACT GOIR 27/28(2006.01) An RF impedance matching
network includes a transforma HOIL 2L/66(2006.01) tion circuit configured to provide a …

6,791,274 B1 9, 2004 Hauer et al. 8,564,381 B2 10/2013 McKinzie 6,794,951 B2 9/2004
Finley 8,569,842 B2 10/2013 Weis et al. 6,818,562 B2 11/2004 Todorow et al. 8,576,010 B2 …

Related US Application Data application No. 15/384, 904, filed on Dec. 20, 2016, now Pat.
No. 9, 729, 122, which is a continuation-in part of application No. 15/046, 585, filed on Feb …

In one embodiment, a Switching circuit includes a first Switch comprising one or more
transistors operably coupled in series with a first terminal, wherein each of the one or more …

An RF impedance matching network includes a transforma tion circuit coupled to an RF
input and configured to provide a transformed impedance that is less than a fixed source …

US9337640B2 - Electrical protection device and method - Google Patents US9337640B2 -
Electrical protection device and method - Google Patents Electrical protection device and …

An RF impedance matching network includes an RF input; an RF output configured to
operably couple to a plasma cham ber; a series electronically variable capacitor (“series …

In one embodiment, the present disclosure is directed to a method for matching an
impedance. The method can include determining or receiving a reflection parameter value …

High-power impulse magnetron sputtering (HiPIMS) is rather a new and rapidly developing
method for physical vapor deposition of thin films. Due to a high ionization degree of the …

(57) ABSTRACT A system and method for managing power delivered to a processing
chamber is described. In one embodiment current is drawn away from the plasma …