Radio-frequency discharges are practically and scientifically interesting. A practical
understanding of such discharges requires, among other things, a quantitative appreciation …

Low-temperature radio frequency plasmas are essential in various sectors of advanced
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …

In this paper, we discuss a number of problems found in the literature related to
experimental measurements of rf discharge electrical and plasma parameters with different …

The authors have done an excellent job of clearly explaining the different nomenclature
used in plasma processing, with the meaning of the symbols and constants commonly …

Electron energy distribution functions (EEDFs) have been measured in a cylindrical
inductively coupled plasma (ICP) with a planar coil over a wide range of external parameters …

Fluid, particle-in-cell and hybrid models are the numerical simulation techniques commonly
used for simulating low-temperature plasma discharges. Despite the complexity of plasma …

This article describes an experimental system that has been used to study inductively
coupled plasma (ICP). The aim of this effort was to generate an experimental ICP database …

Significant frequency dependence of the electron energy distribution has been found in a
low-pressure inductive discharge experiment. The observed frequency dependence reveals …

The mode transition induced by varying the low-frequency current in low-pressure dual-
frequency discharges in argon is found through particle-in-cell or Monte Carlo simulations …

Two classic radio-frequency (RF) plasmas, ie, the capacitively and the inductively coupled
plasmas (CCP and ICP), are widely employed in material processing, eg, etching and thin …