This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

Bio-mechanoreceptors capable of micro-motion sensing have inspired mechanics-guided
designs of micro-motion sensors in various fields. However, it remains a major challenge for …

As an intriguing phenomenon in coupled dynamic systems, mode localization has garnered
considerable attention in areas such as vibration control, sensing, etc. This paper …

Mode-localized sensors have attracted attention because of their high parametric sensitivity
and first-order common-mode rejection to temperature drift. The high-fidelity detection of …

An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower
the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …

This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS
(Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine …

Silicon MEMS resonators are increasingly being adopted for applications in timing and
frequency control, as well as precision sensing. It is well established that a key limitation to …

This paper reports a precision mode-localized accelerometer operating in a higher-order
flexural mode. The accelerometer consists of two symmetric resonators coupled by a central …

The residual stress introduced in the packaging process of the mode localized MEMS
sensors will shift the eigenfrequencies of their coupled resonator array, thereby affecting the …