Hybrid MEMS actuator with 3 degrees-of-freedom for efficient planar optical switching
This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and
piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom …
piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom …
[HTML][HTML] Data-driven reference trajectory optimization for precision motion systems
We propose a data-driven optimization-based pre-compensation method to improve the
contour tracking performance of precision motion stages by modifying the reference …
contour tracking performance of precision motion stages by modifying the reference …
A 3 degrees-of-freedom electrothermal micro-positioner for optical chip-to-chip alignment
This article proposes an electrothermal three-degrees-of-freedom (3-DOF) micro-positioner
equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in …
equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in …
Multi degrees-of-freedom hybrid piezoelectric-electrostatic MEMS actuators integrated with displacement sensors
This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric
and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to …
and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to …
Optimization-Based Trajectory Planning for Precision Motion Systems and Autonomous Robotic Inspection
S Balula - 2023 - research-collection.ethz.ch
In industrial environments economic savings are a primary driver for constant quality and
productivity improvements. For motion systems in particular, improvements can be achieved …
productivity improvements. For motion systems in particular, improvements can be achieved …
MEMS positioners with silicon nitride waveguides for photonic integrated circuits alignment
AAS Rabih - 2024 - espace.etsmtl.ca
The integration of active chips such as lasers and semiconductor optical amplifiers into
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …