A review: research progress of chemical–mechanical polishing slurry for copper interconnection of integrated circuits
H Yan, X Niu, M Qu, F Luo, N Zhan, J Liu… - The International Journal …, 2023 - Springer
When the integrated circuit (IC) feature size is reduced to 0.13 μm and below, copper (Cu)
becomes the new wiring material in interconnect materials. The double damascene process …
becomes the new wiring material in interconnect materials. The double damascene process …
Evaluation of analgesic and anti-inflammatory activities of Rubia cordifolia L. by spectrum-effect relationships
CH Shen, CT Liu, XJ Song, WY Zeng, XY Lu… - … of Chromatography B, 2018 - Elsevier
The objective of the current work was to evaluate the spectrum-effect relationships between
high-performance liquid chromatography fingerprints and analgesic and anti-inflammatory …
high-performance liquid chromatography fingerprints and analgesic and anti-inflammatory …
Optimization of stir–squeeze casting parameters for production of metal matrix composites using a hybrid analytical hierarchy process–Taguchi-Grey approach
ABSTRACT A hybrid optimization approach using analytical hierarchy process (AHP)
combined with Taguchi-Grey has been developed and tested for the first time to optimize the …
combined with Taguchi-Grey has been developed and tested for the first time to optimize the …
Multi-objective optimization of multi-axis ball-end milling Inconel 718 via grey relational analysis coupled with RBF neural network and PSO algorithm
J Zhou, J Ren, C Yao - Measurement, 2017 - Elsevier
Multi-axis ball-end milling is the most commonly used operation in machining aerospace
engine parts. Because of multi-output characteristic, the process improvement often requires …
engine parts. Because of multi-output characteristic, the process improvement often requires …
A novel grey spatial extension relational model and its application to identify the drivers for ambient air quality in Shandong Province, China
H Wu, S Liu, J Du, Z Fang - Science of The Total Environment, 2022 - Elsevier
The ambient air quality is a complex dynamical system that is shocked by a number of
subsystems, such as government policies, industry regulation adjustment and …
subsystems, such as government policies, industry regulation adjustment and …
Analysis of cardinal grey relational grade and grey entropy on achievement of air pollution reduction by evaluating air quality trend in Japan
The Japanese government has promoted a number of policies regarding air pollution control
to regulate the maximum permissible limits of air pollution, including motor vehicles …
to regulate the maximum permissible limits of air pollution, including motor vehicles …
A hybrid multi-criteria decision making approach for strategic retail location investment: Application to Turkish food retailing
Retail location selection decision is a critical and complex process which requires the
evaluation and aggregation of multiple criteria and also the usage of appropriate data …
evaluation and aggregation of multiple criteria and also the usage of appropriate data …
Dry sliding wear behaviour of thixoformed Al-5.7 Si–2Cu-0.3 Mg alloys at high temperatures using Taguchi method
Present work focused on the impact of high temperature on the tribological properties for
thixoformed Al-5.7 Si–2Cu-0.3 Mg alloy. A pin-on-disc tribometer was used for dry sliding …
thixoformed Al-5.7 Si–2Cu-0.3 Mg alloy. A pin-on-disc tribometer was used for dry sliding …
Deep insights into interaction behaviour and material removal of β-SiC wafer in nanoscale polishing
Silicon carbide (β-SiC) polishing aims to maximize material removal rate and surface quality.
Molecular dynamics (MD) simulations revealed β-SiC substrate removal methods with …
Molecular dynamics (MD) simulations revealed β-SiC substrate removal methods with …
Polishing-induced material attrition in surface-texturing AlN using a nanoscale polishing tool: An atomic-scale understanding
This study examines the alterations in the material properties and the effectiveness of the
nano-polishing process applied to the surface of AlN substrate material through molecular …
nano-polishing process applied to the surface of AlN substrate material through molecular …