We introduce a method to fabricate solid-state nanopores with sub-20 nm diameter in
membranes with embedded metal electrodes across a 200 mm wafer using CMOS …

Advances in the fundamentals and applications of diffraction gratings have received much
attention. However, conventional diffraction gratings often suffer from higher-order diffraction …

Inherent strong lateral and longitudinal chromatic dispersion of a transmission resonance
domain off-axis diffractive lens were studied theoretically and experimentally. It is shown that …

The moiré-based interferometry is demonstrated to significantly improve the measurement
range in wafer-mask alignment by adopting two specifically designed four-quadrant grating …

Achromatic Talbot lithography (ATL) with high resolution has been demonstrated to be an
excellent technique for large area periodic nano-fabrication. In this work, the uniformity of …

A method of designing broad angular phase retarders in the extreme ultraviolet (EUV)
region is presented. The design is based on a standard Levenberg–Marquardt algorithm …

We present a novel photocathode which can make x-ray streak cameras to be of a flat
spectral response in the x-ray energy range of 0.1-5 keV. The photocathode consists of two …

Broadband light transparency of metallic structures has long been pursued due to the
potential applications in the optoelectronic communications, flat panel displays, and clean …

Contact exposure is expected to occur in conventional lithography, and can be a source of
process deviations (such as shrinking and distortion of templates) during reactive ion …

We report the nanofabrication and characterization of x-ray transmission gratings with a high
aspect ratio and a feature size of down to 65 nm. Two nanofabrication methods, the …