A review of the recent applications of aluminum nitride-based piezoelectric devices
Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …
because many technologies utilize their core properties of piezoelectric materials. Previous …
Piezoelectric actuation<? pag\break?> for integrated photonics
Recent decades have seen significant advancements in integrated photonics, driven by
improvements in nanofabrication technology. This field has been developed from integrated …
improvements in nanofabrication technology. This field has been developed from integrated …
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and
compressibility with a compact and small design is presented. The fluid measurement …
compressibility with a compact and small design is presented. The fluid measurement …
Design and applications of integrated transducers in commercial CMOS technology
Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS
technology offers enhanced functionality for integrated circuits (IC) and the potential …
technology offers enhanced functionality for integrated circuits (IC) and the potential …
Phased array based on AlScN Piezoelectric Micromachined Ultrasound Transducers monolithically integrated on CMOS
In this work we present an array of piezoelectric micromachined ultrasound transducer
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …
Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance
Y Wang, T Lv, J Zhang, H Yu - Microsystems & Nanoengineering, 2024 - nature.com
To address the serious acoustic performance deterioration induced by air leakage in the low-
frequency range and the asynchronous vibration in electroacoustic transduction structures …
frequency range and the asynchronous vibration in electroacoustic transduction structures …
A high-performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure
This letter presents a high-performance scandium-doped aluminum nitride (Sc x Al 1-x N, x=
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …
A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging
Y Yao, L Jia, C Liu, X Wang, C Sun, S Liu… - Sensors and Actuators A …, 2023 - Elsevier
In this article, a scandium-doped aluminum nitride (Sc 0.2 Al 0.8 N) piezoelectric
micromachined ultrasound transducer (PMUT) array for underwater imaging is presented …
micromachined ultrasound transducer (PMUT) array for underwater imaging is presented …
A ScAlN-based piezoelectric MEMS microphone with sector-connected cantilevers
With increasing requirements for massive sound acquisition, piezoelectric MEMS
microphones (PMMs) have attracted widespread attention due to the advantages of low …
microphones (PMMs) have attracted widespread attention due to the advantages of low …
Design and characterization of a high performance transceiver integrated PMUTs array for breast cancer imaging
L Jia, Y Liang, G Zhang, R Wang, C He, Y Yang, J Cui… - Measurement, 2024 - Elsevier
This paper introduces an innovative transceiver integrated with high-performance
piezoelectric micromachined ultrasonic transducers (PMUTs) array, specifically designed for …
piezoelectric micromachined ultrasonic transducers (PMUTs) array, specifically designed for …