Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …
Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors
In this paper, a thin film PZT MEMS actuator feedback controlled with integrated buried
piezoresistors is reported. Two PID controllers were used to implement a phase-locked loop …
piezoresistors is reported. Two PID controllers were used to implement a phase-locked loop …
Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control
This paper reports on a 1D PZT micromirror integrated with buried piezoresistors for quasi-
static feedback position control. The piezoresistors located along or below the PZT actuators …
static feedback position control. The piezoresistors located along or below the PZT actuators …
Confocal laser displacement sensor using a micro-machined varifocal mirror
K Nakazawa, T Sasaki, H Furuta, J Kamiya, H Sasaki… - Applied Optics, 2017 - opg.optica.org
A confocal laser displacement sensor using a micro-machined varifocal mirror is reported.
The focal length modulation is a key function of the confocal sensor. The mechanism of the …
The focal length modulation is a key function of the confocal sensor. The mechanism of the …
Resonant varifocal mems mirror
This paper presents a novel varifocal mirror made of a micro-electromechanical system
(MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) …
(MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) …
High-speed and large-amplitude resonant varifocal mirror
We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type
focus scanning optical element. A circumference supported type mirror and a node …
focus scanning optical element. A circumference supported type mirror and a node …
Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function
T Sasaki, A Piot, C Fleury, S Guerreiro… - 2024 IEEE 37th …, 2024 - ieeexplore.ieee.org
A piezoelectrically actuated two-dimensional micromirror with varifocal function is
demonstrated. The tilting functions and the varifocal function are operated using PZT thin …
demonstrated. The tilting functions and the varifocal function are operated using PZT thin …
PZT MEMS actuator with integrated buried piezoresistors for position control
We have monolithically integrated a PZT thin film and" buried" Si piezoresistive sensors for
piezoelectric MEMS actuators. The PZT thin film works as a sensor as well as an actuator …
piezoelectric MEMS actuators. The PZT thin film works as a sensor as well as an actuator …
Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor
K Nakazawa, T Sasaki, H Furuta… - … on Optical MEMS …, 2017 - ieeexplore.ieee.org
Paper Title (use style: paper title) Page 1 Fabrication of Varifocal Scanner Integrated with
Piezoresistive Focal Length and Angle Sensors Kenta Nakazawa1,*, Takashi Sasaki1 …
Piezoresistive Focal Length and Angle Sensors Kenta Nakazawa1,*, Takashi Sasaki1 …
私の歩きはじめた道解説博士論文集積化焦点可変マイクロミラーの開発とその応用
中澤謙太 - 精密工学会誌= Journal of the Japan Society for …, 2023 - jstage.jst.go.jp
現在は静岡大学で教員 (助教) として働いております. 博士課程への進学の経緯を記載する前に,
まずは私の簡単な経歴を説明いたします. 2013 年に静岡大学工学部機械工学科を卒業, 2015 …
まずは私の簡単な経歴を説明いたします. 2013 年に静岡大学工学部機械工学科を卒業, 2015 …