[HTML][HTML] Nonpolar III-nitride vertical-cavity surface-emitting laser with a photoelectrochemically etched air-gap aperture

JT Leonard, BP Yonkee, DA Cohen, L Megalini… - Applied Physics …, 2016 - pubs.aip.org
We demonstrate a III-nitride nonpolar vertical-cavity surface-emitting laser (VCSEL) with a
photoelectrochemically (PEC) etched aperture. The PEC lateral undercut etch is used to …

Photoelectrochemical liftoff of LEDs grown on freestanding c-plane GaN substrates

D Hwang, BP Yonkee, BS Addin, RM Farrell… - Optics express, 2016 - opg.optica.org
We demonstrate a thin-film flip-chip (TFFC) process for LEDs grown on freestanding c-plane
GaN substrates. LEDs are transferred from a bulk GaN substrate to a sapphire submount via …

Smooth and selective photo-electrochemical etching of heavily doped GaN: Si using a mode-locked 355 nm microchip laser

SG Lee, S Mishkat-Ul-Masabih, JT Leonard… - Applied Physics …, 2016 - iopscience.iop.org
We investigate the photo-electrochemical (PEC) etching of Si-doped GaN samples grown on
nonpolar GaN substrates, using a KOH/K 2 S 2 O 8 solution and illuminated by a Xe arc …

Chemically assisted ion beam etching of laser diode facets on nonpolar and semipolar orientations of GaN

LY Kuritzky, DL Becerra, AS Abbas… - Semiconductor …, 2016 - iopscience.iop.org
We demonstrate a vertical (< 1 departure) and smooth (2.0 nm root mean square line-edge
roughness (LER)) etch by chemically assisted Ar ion beam etching (CAIBE) in Cl 2 chemistry …

Enhancement of n-type GaN (20–21) semipolar surface morphology in photo-electrochemical undercut etching

AS Abbas, AY Alyamani, S Nakamura… - Applied Physics …, 2019 - iopscience.iop.org
Enhancement of n-type GaN (20–21) semipolar surface morphology in photo-electrochemical
undercut etching - IOPscience Skip to content IOP Science home Accessibility Help Search …

Microdisk-type multicolor semipolar nitride-based light-emitting diodes

HW Kim, YC Na, J Park, SN Lee - ACS Applied Nano Materials, 2022 - ACS Publications
Recently, III-nitride semiconductors have gained immense attention for application in high-
performance optoelectronic devices. However, in the device fabrication process, it is …

[图书][B] III-Nitride Vertical-Cavity Surface-Emitting Lasers

JT Leonard - 2016 - search.proquest.com
Vertical-cavity surface-emitting lasers (VCSELs) have a long history of development in GaAs-
based and InP-based systems, however III-nitride VCSELs research is still in its infancy. Yet …

Lift-off of semipolar blue and green III-nitride LEDs grown on free-standing GaN

L Chan, P Shapturenka, CD Pynn, T Margalith… - Applied Physics …, 2020 - pubs.aip.org
Light emitting diodes (LEDs), with active blue and green emitting and sacrificial multi-
quantum well layers, were epitaxially grown using metal organic chemical vapor deposition …

Estimation of roughness‐induced scattering losses in III‐nitride laser diodes with a photoelectrochemically etched current aperture

L Megalini, R Shenoy, K Rose, JP Speck… - … status solidi (a), 2016 - Wiley Online Library
We estimate the roughening‐induced scattering optical losses in III‐nitride current aperture
laser diodes (CA‐LDs) caused by imperfect photoelectrochemical (PEC) etching of the …

Damage-free substrate removal technique: wet undercut etching of semipolar laser structures by incorporation of un/relaxed sacrificial layer single quantum well

AS Abbas, AY Alyamani, S Nakamura… - Japanese Journal of …, 2021 - iopscience.iop.org
We applied a damage-free substrate removal technique using photoelectrochemical etching
(PECE) by incorporating sacrificial layer In 0.12 Ga 0.88 N single quantum well (SL-SQW) …