Metal‐assisted chemical etching of silicon in oxidizing HF solutions: origin, mechanism, development, and black silicon solar cell application
C Huo, J Wang, H Fu, X Li, Y Yang… - Advanced Functional …, 2020 - Wiley Online Library
Metal‐assisted chemical etching (MacEtch) of silicon in oxidizing hydrofluoric acid (HF)
solutions has emerged as a prominent top‐down micro/nanofabrication approach for a wide …
solutions has emerged as a prominent top‐down micro/nanofabrication approach for a wide …
Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review
S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
Large-scale synthesis of highly uniform silicon nanowire arrays using metal-assisted chemical etching
The combination of metal-assisted chemical etching (MACE) with colloidal lithography has
emerged as a simple and cost-effective approach to nanostructure silicon. It is especially …
emerged as a simple and cost-effective approach to nanostructure silicon. It is especially …
Achieving a sub-10 nm nanopore array in silicon by metal-assisted chemical etching and machine learning
Solid-state nanopores with controllable pore size and morphology have huge application
potential. However, it has been very challenging to process sub-10 nm silicon nanopore …
potential. However, it has been very challenging to process sub-10 nm silicon nanopore …
Producing silicon carbide micro and nanostructures by plasma‐free metal‐assisted chemical etching
JA Michaels, L Janavicius, X Wu… - Advanced Functional …, 2021 - Wiley Online Library
Silicon carbide (SiC) is a wide bandgap third‐generation semiconductor well suited for
harsh environment power electronics, micro and nano electromechanical systems, and …
harsh environment power electronics, micro and nano electromechanical systems, and …
Enhanced Performance of Ge Photodiodes via Monolithic Antireflection Texturing and α-Ge Self-Passivation by Inverse Metal-Assisted Chemical Etching
Surface antireflection micro and nanostructures, normally formed by conventional reactive
ion etching, offer advantages in photovoltaic and optoelectronic applications, including …
ion etching, offer advantages in photovoltaic and optoelectronic applications, including …
Ruthenium-assisted chemical etching of silicon: Enabling CMOS-compatible 3D semiconductor device nanofabrication
A Mallavarapu, P Ajay, C Barrera… - ACS Applied Materials …, 2020 - ACS Publications
The semiconductor industry's transition to three-dimensional (3D) logic and memory devices
has revealed the limitations of plasma etching in reliable creation of vertical high aspect ratio …
has revealed the limitations of plasma etching in reliable creation of vertical high aspect ratio …
CMOS-Compatible Catalyst for MacEtch: Titanium nitride-assisted chemical etching in vapor phase for high Aspect ratio Silicon nanostructures
Metal-assisted chemical etching (MacEtch) is an emerging anisotropic chemical etching
technique that has been used to fabricate high aspect ratio semiconductor micro-and …
technique that has been used to fabricate high aspect ratio semiconductor micro-and …
Damage-free smooth-sidewall InGaAs nanopillar array by metal-assisted chemical etching
Producing densely packed high aspect ratio In0. 53Ga0. 47As nanostructures without
surface damage is critical for beyond Si-CMOS nanoelectronic and optoelectronic devices …
surface damage is critical for beyond Si-CMOS nanoelectronic and optoelectronic devices …
Microfabrication of X-ray optics by metal assisted chemical etching: A review
L Romano, M Stampanoni - Micromachines, 2020 - mdpi.com
High-aspect-ratio silicon micro-and nanostructures are technologically relevant in several
applications, such as microelectronics, microelectromechanical systems, sensors …
applications, such as microelectronics, microelectromechanical systems, sensors …