Micromechanical cantilever sensors are attracting a lot of attention because of the need for
characterizing, detecting, and monitoring chemical and physical properties, as well as …

The coefficient of thermal expansion (CTE) is an important mechanical property for thin film
materials. There are several problems that arise from the thermal expansion effect; for …

Microcantilever sensor technology has been steadily growing for the last 15 years. While we
have gained a great amount of knowledge in microcantilever bending due to surface stress …

Abstract The Bernoulli–Euler beam formulation is extended by means of the nonlocal strain
gradient theory in the nonhomogenous temperature field setting. Starting from the nonlocal …

A rational design methodology for materials with optimal mechanical properties is a
prerequisite for developing programmable soft matter that undergoes structural changes in …

Silver thin films (200nm) were deposited on two different substrates, SiO2 and polyethylene
naphthalate (PEN) by e-beam evaporation. The thickness of the Ag thin film on both …

In this paper, a digital speckle correlation method for coefficient of thermal expansion (CTE)
measurement of film is developed, in which CTE is the intrinsic parameter and direct …

In this paper, the effect of cantilever width is demonstrated on the stress-induced bending of
micromachined bilayer cantilevers. In previous literature, the bilayer cantilever has been …

Many standard CMOS processes, provided by existing foundries, are available. These
standard CMOS processes, with stacking of various metal and dielectric layers, have been …

The dependence of the resonance frequency of thermally excited microcantilever resonators
on temperature has been reported by several papers. All these papers ignored the film …