Polishing, preparation and patterning of diamond for device applications

ML Hicks, AC Pakpour-Tabrizi, RB Jackman - Diamond and Related …, 2019 - Elsevier
Central to future electronic device developments in diamond is the provision of smooth, low
defect density substrate materials. This review examines plasma treatments of diamond to …

Polishing and planarization of single crystal diamonds: state-of-the-art and perspectives

H Luo, KM Ajmal, W Liu, K Yamamura… - International Journal of …, 2021 - iopscience.iop.org
Diamond is a promising material for the modern industry. It is widely used in different
applications, such as cutting tools, optical windows, heat dissipation, and semiconductors …

Chemical vapor deposited diamond with versatile grades: from gemstone to quantum electronics

Y Zheng, C Li, J Liu, J Wei, X Zhang, H Ye… - Frontiers of Materials …, 2022 - Springer
Chemical vapor deposited (CVD) diamond as a burgeoning multifunctional material with
tailored quality and characteristics can be artificially synthesized and controlled for various …

Large-area high-quality single crystal diamond

M Schreck, J Asmussen, S Shikata, JC Arnault… - Mrs Bulletin, 2014 - cambridge.org
Diamond offers a unique combination of extreme physical properties. For many
technological applications, diamond samples of the highest crystal quality are required to …

Design of vertical diamond Schottky barrier diode with a novel beveled junction termination extension

D Li, T Wang, W Lin, Y Zhu, Q Wang, X Lv, L Li… - Diamond and Related …, 2022 - Elsevier
In this paper, vertical diamond Schottky barrier diode with a beveled junction termination
extension is designed by using Silvaco TCAD. We firstly investigate the effects of the pn …

Etch‐pit formation mechanism induced on HPHT and CVD diamond single crystals by H2/O2 plasma etching treatment: Part of Topical Section on Fundamentals and …

M Naamoun, A Tallaire, F Silva, J Achard… - … status solidi (a), 2012 - Wiley Online Library
H2/O2 plasma treatments offer advantages over other etching processes of diamond as a
technique to prepare the substrate surface prior to chemical vapor deposition (CVD) …

Efficiency of dislocation density reduction during heteroepitaxial growth of diamond for detector applications

C Stehl, M Fischer, S Gsell, E Berdermann… - Applied Physics …, 2013 - pubs.aip.org
The development of dislocation density and micro-strain in heteroepitaxial diamond films on
iridium was measured over more than two decades of thickness up to d≈ 1 mm. Simple …

Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical …

Y Zheng, Y Jia, J Liu, J Wei, L Chen, K An, X Yan… - Vacuum, 2022 - Elsevier
Surface etching of single-crystal diamond (SCD) in hydrogen plasma plays a decisive role
for high-quality homoepitaxy and surface conduction of diamond. The complexity of …

[HTML][HTML] Optical characterization of grain orientation in crystalline materials

B Gaskey, L Hendl, X Wang, M Seita - Acta Materialia, 2020 - Elsevier
Characterizing crystallographic orientation is essential for assessing structure-property
relationships in crystalline solids. While diffraction methods have dominated this field, low …

Identification of dislocations in synthetic chemically vapor deposited diamond single crystals

A Tallaire, T Ouisse, A Lantreibecq, R Cours… - Crystal Growth & …, 2016 - ACS Publications
High purity chemically vapor deposited (CVD) diamond single crystals are now widely
available. However, the reduction of dislocations in this material still remains an important …