The commercial success of radio-frequency acoustic filters in wireless communication
systems has launched aluminum nitride (AlN) as one of the most widely used …

The objective of this work is to describe the current state of the rapidly evolving field of 3D
piezoelectric microelectromechanical systems (piezoMEMS), and where it needs to go to …

A novel design that utilizes aluminum nitride (AlN) piezoelectric thin films deposited on
vertical surfaces for lateral motion and sensing is a step toward emerging multi‐axial …

This work demonstrates intrinsic area-selective deposition of AlN films by thermal atomic
layer deposition (ALD). Using sequential pulses of trimethylaluminum and NH3 at a …

With the integration of 5G in day-to-day devices and the foreseeable 6G revolution, demand
for advanced radio frequency (RF) microelectromechanical systems (MEMS) is growing …

We demonstrate an N 2 plasma-enhanced process for inducing (0001)-oriented ALD-grown
AlN on planar substrates. We evaluate the impact of {111}-textured Pt as a growth template …

Aluminum nitride (AlN) grown on vertical surfaces can be utilized for the fabrication of
advanced piezoelectric microelectromechanical systems (MEMS). The in‐plane motion of …

Plasma-enhanced atomic layer deposition was employed to grow aluminum nitride (AlN)
thin films on Si (100), Si (111), and c-plane sapphire substrates at 250° C …

One of the key advantages of Piezoelectric MEMS (PiezoMEMS) is its scalability,
overcoming issues commonly associated with alternative transduction methods. However …

Devices based on piezoelectric actuation are some of the most promising among the
microelectromechanical systems (MEMS). Commonly, piezoelectric materials, such as …