▪ Abstract The scanning capacitance microscope (SCM) provides a direct method for
mapping the dopant distribution in a semiconductor device on a 10 nm scale. This capability …

Atomic force microscopy (AFM) is a key tool for nanotechnology research and finds its
principal application in the determination of surface topography. However, the use of the …

An overview of the existing two-dimensional carrier profiling tools using scanning probe
microscopy includes several scanning tunneling microscopy modes, scanning capacitance …

Recent progress in both the development of characterization tools for the assessment of
surface integrity, and the experimental examination of surface alteration, is reported …

A myriad of security vulnerabilites can be exposed via the reverse engineering of the
integrated circuits contained in electronics systems. The goal of IC reverse engineering is to …

Since its invention in the early 1980, scanning tunneling microscopy1-4 (STM) and
techniques such as atomic force microscopy5 (AFM) that have evolved from it have become …

With current tools and technology, someone who has physical access to a chip can extract
the detailed layout of the integrated circuit (IC). By using advanced visual imaging …

Analog Integrated Circuits (ICs) are one of the top targets for counterfeiting. However, the
security of analog Intellectual Property (IP) is not well investigated as its digital counterpart …

Trapped electrons and holes, and their dynamics, were visualized from spatially resolved
capacitance–voltage (C–V) curves and dC/dV images using scanning capacitance …

Quantitative two-dimensional dopant profiling of a gatelike structure is achieved by scanning
capacitance microscopy (SCM). A processed silicon wafer is sectioned then polished such …