[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …
Surface acoustic wave devices for sensor applications
B Liu, X Chen, H Cai, MM Ali, X Tian… - Journal of …, 2016 - iopscience.iop.org
Surface acoustic wave (SAW) devices have been widely used in different fields and will
continue to be of great importance in the foreseeable future. These devices are compact …
continue to be of great importance in the foreseeable future. These devices are compact …
Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies
SA Tadesse, M Li - Nature communications, 2014 - nature.com
Light–sound interactions have long been exploited in various acousto-optic devices based
on bulk crystalline materials. Conventionally, these devices operate in megahertz frequency …
on bulk crystalline materials. Conventionally, these devices operate in megahertz frequency …
GaN/Si based single SAW resonator temperature sensor operating in the GHz frequency range
The paper presents the manufacturing and characterization of GaN based SAW (surface
acoustic wave) type temperature sensors. In contrast with most SAW sensor structures …
acoustic wave) type temperature sensors. In contrast with most SAW sensor structures …
Mechanical, corrosion and biological properties of room-temperature sputtered aluminum nitride films with dissimilar nanostructure
C Besleaga, V Dumitru, LM Trinca, AC Popa… - Nanomaterials, 2017 - mdpi.com
Aluminum Nitride (AlN) has been long time being regarded as highly interesting material for
developing sensing applications (including biosensors and implantable sensors). AlN, due …
developing sensing applications (including biosensors and implantable sensors). AlN, due …
Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators
AlN/diamond heterostructures are very promising for high frequency surface acoustic wave
(SAW) resonators. In their design, the thickness of the piezoelectric film is one of the key …
(SAW) resonators. In their design, the thickness of the piezoelectric film is one of the key …
The behavior of gold metallized AlN/Si-and AlN/glass-based SAW structures as temperature sensors
Thin AlN piezoelectric layers have been deposited on high resistivity Si and glass substrates
by reactive RF magnetron sputtering, in order to manufacture one-port gigahertz operating …
by reactive RF magnetron sputtering, in order to manufacture one-port gigahertz operating …
AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface Acoustic Wave Filter With −12.8-dB Minimum Insertion Loss
UC Kaletta, C Wipf, M Fraschke… - … on Electron Devices, 2015 - ieeexplore.ieee.org
A CMOS compatible AlN/SiO 2/Si 3 N 4/Si (100) surface acoustic wave (SAW) device has
been fabricated and will be compared with standard AlN/SiO 2-based devices. The …
been fabricated and will be compared with standard AlN/SiO 2-based devices. The …
Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering
Spectroscopic ellipsometry, X-ray diffraction and transmission electron microscopy
experiments are employed to characterize aluminum nitride (AlN) thin films obtained by …
experiments are employed to characterize aluminum nitride (AlN) thin films obtained by …
[PDF][PDF] AZO thin films synthesized by RF–magnetron sputtering: The role of deposition power
Transparent c-axis textured aluminum doped zinc oxide (AZO) films were deposited at room
temperature onto glass substrates by radio-frequency magnetron sputtering. The effect of …
temperature onto glass substrates by radio-frequency magnetron sputtering. The effect of …