With the development of technology, systems gravitate towards increasing in their
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …

Miniaturized ultrasonic transducer arrays with multiple frequencies are key components in
endoscopic photoacoustic imaging (PAI) systems to achieve high spatial resolution and …

This article presents the development of small sized piezoelectric micromachined ultrasound
transducer (PMUT) with cost effective fabrication process. Improved ultrasound imaging …

This study provides a comprehensive characterization of a 4 4 piezoelectric micromachined
ultrasonic transducer (PMUT) array suited for in-air applications. Crosstalk can be viewed as …

We introduce a novel piezoelectric micromachined ultrasonic transducer (PMUT) with a
mass-loaded suspended (MLSP) design, fabricated using sacrificial technique to advance …

This paper introduces a piezoelectric micromachined ultrasonic transducer (PMUT) capable
of simultaneous acoustic power transfer and multi-channel data telemetry. Using a custom …

Piezoelectric micromachined ultrasound transducer (PMUT) technology has been
investigated as a promising alternative to conventional bulk piezoelectric transducer for …

This paper investigates the effect of crosstalk among the diaphragms of a 4 x 4 Piezoelectric
Micromachined Ultrasonic Transducers (PMUT) array, designed for in-air applications, on its …

Si 基微电子机械系统(MEMS) 经过三十余年的发展已进入智能微系统的发展阶段,
已成为当今MEMS 技术创新发展的主流. 当今半导体材料技术的科研已进入超宽禁带半导体的 …

Common methods to enhance PMUT arrays' Bandwidth (BW) may compromise the
sensitivity and fill factor. This study introduces a novel PMUT array with circular suspended …