Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-b-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

H Tsai, JW Pitera, H Miyazoe, S Bangsaruntip… - ACS …, 2014 - ACS Publications
Directed self-assembly (DSA) of lamellar phase block-co-polymers (BCPs) can be used to
form nanoscale line-space patterns. However, exploiting the potential of this process for …

Enabling complex nanoscale pattern customization using directed self-assembly

GS Doerk, JY Cheng, G Singh, CT Rettner… - Nature …, 2014 - nature.com
Block copolymer directed self-assembly is an attractive method to fabricate highly uniform
nanoscale features for various technological applications, but the dense periodicity of block …

A general design strategy for block copolymer directed self-assembly patterning of integrated circuits contact holes using an alphabet approach

H Yi, XY Bao, R Tiberio, HSP Wong - Nano letters, 2015 - ACS Publications
Directed self-assembly (DSA) is a promising lithography candidate for technology nodes
beyond 14 nm. Researchers have shown contact hole patterning for random logic circuits …

Metamaterial superconductors

II Smolyaninov, VN Smolyaninova - Nanophotonics, 2018 - degruyter.com
Searching for natural materials exhibiting larger electron-electron interactions constitutes a
traditional approach to high-temperature superconductivity research. Very recently, we …

Review of computational lithography modeling: focusing on extending optical lithography and design-technology co-optimization

K Lai - Advanced Optical Technologies, 2012 - degruyter.com
Advances in computational lithography over the last 10 years have been instrumental to the
continued scaling of semiconductor devices. Competitive scaling requires two types of …

Design and manufacturing process co-optimization in nano-technology (Designer Track Paper)

MK Hsu, N Katta, HYH Lin, KTH Lin… - 2014 IEEE/ACM …, 2014 - ieeexplore.ieee.org
Newest manufacturing technologies with feature sizes smaller than 20nm and FinFET
devices have favored more restrictive design rules for manufacturability while suffering from …

Metamaterial superconductors

II Smolyaninov, VN Smolyaninova - Physical Review B, 2015 - APS
Epsilon near zero (ENZ) conditions have been observed to enhance superconducting
properties of a composite metamaterial based on random mixing of superconductor and …

Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide

M Truccato, A Agostino, E Borfecchia, L Mino… - Nano Letters, 2016 - ACS Publications
We describe the first use of a novel photoresist-free X-ray nanopatterning technique to
fabricate an electronic device. We have produced a proof-of-concept device consisting of a …

Architectural strategies in standard-cell design for the 7 nm and beyond technology node

SMY Sherazi, B Chava, P Debacker… - Journal of Micro …, 2016 - spiedigitallibrary.org
Standard-cell design and characterization are presented for 7-nm CMOS platform
technology targeting low-power and high-performance applications with the tightest …

Application of cell-aware test on an advanced 3nm CMOS technology library

Z Gao, S Malagi, MC Hu, J Swenton… - 2019 IEEE …, 2019 - ieeexplore.ieee.org
Advanced technology nodes employ a large number of innovations. In addition, they
requirescaling boosters' in the design of standard-cell libraries to be able to offer the scaling …