Design and applications of MEMS flow sensors: A review

F Ejeian, S Azadi, A Razmjou, Y Orooji… - Sensors and Actuators A …, 2019 - Elsevier
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Micromachined thermal flow sensors—A review

JTW Kuo, L Yu, E Meng - Micromachines, 2012 - mdpi.com
Microfabrication has greatly matured and proliferated in use amongst many disciplines.
There has been great interest in micromachined flow sensors due to the benefits of …

Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications

T Dinh, HP Phan, A Qamar, P Woodfield… - Journal of …, 2017 - ieeexplore.ieee.org
Microelectromechanical systems sensors have been intensively developed utilizing various
physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among …

Flexible smart sensing skin for “Fly-by-Feel” morphing aircraft

YA Huang, C Zhu, WN Xiong, Y Wang, YG Jiang… - Science China …, 2022 - Springer
Flexible smart sensing skin is a key enabling technology for the future “Fly-by-Feel” control
of morphing aircraft. It represents the next-generation skin of aircraft that can exhibit a more …

Environment-friendly carbon nanotube based flexible electronics for noninvasive and wearable healthcare

T Dinh, HP Phan, TK Nguyen, A Qamar… - Journal of Materials …, 2016 - pubs.rsc.org
Flexible and stretchable electronics have a wide variety of wearable applications in portable
sensors, flexible electrodes/heaters, flexible circuits and stretchable displays. Spinnable …

High-performance integrated chip-level thermoelectric device for power generation and microflow detection

Z Liu, S Zhang, Z Wu, E Mu, H Wei, Y Liu, H Shi, Z Hu - Nano Energy, 2023 - Elsevier
Miniaturized thermoelectric devices (TED) possess great benefits in energy converting and
sensing. By employing improved microfabrication technology, we succeed made an ultra …

Anemometer with hot platinum thin film

F Mailly, A Giani, R Bonnot, P Temple-Boyer… - Sensors and Actuators A …, 2001 - Elsevier
The techniques of micromachining silicon are used for the manufacture of an anemometer
with low electric consumption and great sensitivity. To reduce the energy consumption, a …

A heater-integrated transparent microchannel chip for continuous-flow PCR

K Sun, A Yamaguchi, Y Ishida, S Matsuo… - Sensors and Actuators B …, 2002 - Elsevier
A microchannel chip for continuous-flow polymerase chain reaction (PCR) was developed
using transparent materials. The microchannel was fabricated on a quartz glass substrate …

MEMS-based gas flow sensors

YH Wang, CP Chen, CM Chang, CP Lin, CH Lin… - Microfluidics and …, 2009 - Springer
Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements,
sensors, actuators, and electronics on a single silicon substrate in order to accomplish a …

Wearable breath monitoring via a hot-film/calorimetric airflow sensing system

T Jiang, L Deng, W Qiu, J Liang, Y Wu, Z Shao… - Biosensors and …, 2020 - Elsevier
Monitoring the breath information from two nostrils can detect breath-related health
problems. In this work, we introduce a wearable hot-film/calorimetric breath sensing system …