Design and applications of MEMS flow sensors: A review
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …
industrial and environmental applications. Besides the critical demands on sensing range of …
Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications
Microelectromechanical systems sensors have been intensively developed utilizing various
physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among …
physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among …
Flexible smart sensing skin for “Fly-by-Feel” morphing aircraft
Flexible smart sensing skin is a key enabling technology for the future “Fly-by-Feel” control
of morphing aircraft. It represents the next-generation skin of aircraft that can exhibit a more …
of morphing aircraft. It represents the next-generation skin of aircraft that can exhibit a more …
Environment-friendly carbon nanotube based flexible electronics for noninvasive and wearable healthcare
Flexible and stretchable electronics have a wide variety of wearable applications in portable
sensors, flexible electrodes/heaters, flexible circuits and stretchable displays. Spinnable …
sensors, flexible electrodes/heaters, flexible circuits and stretchable displays. Spinnable …
High-performance integrated chip-level thermoelectric device for power generation and microflow detection
Miniaturized thermoelectric devices (TED) possess great benefits in energy converting and
sensing. By employing improved microfabrication technology, we succeed made an ultra …
sensing. By employing improved microfabrication technology, we succeed made an ultra …
Anemometer with hot platinum thin film
The techniques of micromachining silicon are used for the manufacture of an anemometer
with low electric consumption and great sensitivity. To reduce the energy consumption, a …
with low electric consumption and great sensitivity. To reduce the energy consumption, a …
A heater-integrated transparent microchannel chip for continuous-flow PCR
K Sun, A Yamaguchi, Y Ishida, S Matsuo… - Sensors and Actuators B …, 2002 - Elsevier
A microchannel chip for continuous-flow polymerase chain reaction (PCR) was developed
using transparent materials. The microchannel was fabricated on a quartz glass substrate …
using transparent materials. The microchannel was fabricated on a quartz glass substrate …
MEMS-based gas flow sensors
YH Wang, CP Chen, CM Chang, CP Lin, CH Lin… - Microfluidics and …, 2009 - Springer
Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements,
sensors, actuators, and electronics on a single silicon substrate in order to accomplish a …
sensors, actuators, and electronics on a single silicon substrate in order to accomplish a …
Wearable breath monitoring via a hot-film/calorimetric airflow sensing system
Monitoring the breath information from two nostrils can detect breath-related health
problems. In this work, we introduce a wearable hot-film/calorimetric breath sensing system …
problems. In this work, we introduce a wearable hot-film/calorimetric breath sensing system …