[HTML][HTML] Atomic layer deposition and other thin film deposition techniques: from principles to film properties
Thin film is a modern technology aimed at improving the structural, electrical, magnetic,
optical, and mechanical properties of bulk materials. This technology has so far found …
optical, and mechanical properties of bulk materials. This technology has so far found …
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …
suitable for depositing uniform and conformal films on complex three-dimensional …
Atomic layer deposition of metal sulfide materials
Conspectus The field of nanoscience is delivering increasingly intricate yet elegant
geometric structures incorporating an ever-expanding palette of materials. Atomic layer …
geometric structures incorporating an ever-expanding palette of materials. Atomic layer …
Advances in atomic layer deposition of metal sulfides: from a precursors perspective
Development at the nanoscale has established diverse and complex structures with the help
of a growing selection of materials to choose from. Among the major developments that has …
of a growing selection of materials to choose from. Among the major developments that has …
Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition
Investment into photovoltaic (PV) research has accelerated over the past decade as
concerns over energy security and carbon emissions have increased. The types of PV …
concerns over energy security and carbon emissions have increased. The types of PV …
Targeted single-site MOF node modification: trivalent metal loading via atomic layer deposition
Postsynthetic functionalization of metal organic frameworks (MOFs) enables the controlled,
high-density incorporation of new atoms on a crystallographically precise framework …
high-density incorporation of new atoms on a crystallographically precise framework …
Aqueous bath process for deposition of Cu2ZnSnS4 photovoltaic absorbers
A Wangperawong, JS King, SM Herron, BP Tran… - Thin Solid Films, 2011 - Elsevier
Chemical bath deposition and ion exchange were used to incorporate copper, zinc, tin and
sulfur into a thin film precursor stack. The stack was then sulfurized to form the photovoltaic …
sulfur into a thin film precursor stack. The stack was then sulfurized to form the photovoltaic …
Thermal atomic layer etching of zinc sulfide using sequential trimethylaluminum and hydrogen fluoride exposures: Evidence for a conversion mechanism
Thermal atomic layer etching (ALE) of zinc sulfide (ZnS) was demonstrated using sequential
exposures of Al (CH3) 3 (trimethylaluminum (TMA)) and HF (hydrogen fluoride). ZnS is one …
exposures of Al (CH3) 3 (trimethylaluminum (TMA)) and HF (hydrogen fluoride). ZnS is one …
Self-assembly based plasmonic arrays tuned by atomic layer deposition for extreme visible light absorption
Achieving complete absorption of visible light with a minimal amount of material is highly
desirable for many applications, including solar energy conversion to fuel and electricity …
desirable for many applications, including solar energy conversion to fuel and electricity …
Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors
In this paper, we present the progress in the growth of nanoscale semiconductors grown via
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …