This paper investigates an adaptive backstepping funnel control scheme with an event-
triggered mechanism for a chaotic dual-mass Micro-Electro-Mechanical Systems (MEMS) …

In this paper, nonlinearity is used to enhance the sensitivity and bandwidth performance of
tapered beam micro-gyroscopes. Considering the electrostatic force nonlinearity and …

As a common type of microelectromechanical systems (MEMS) inertial sensors, comb-
structured air-gap acceleration sensors have been applied to various industrial devices and …

In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of
an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system …

This paper presents microfabrication process-driven design of a multi-degree of freedom
(multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope …

Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the
system sensitivity performance. The Frequency modulation (FM) method is proposed as an …

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-
thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF …

In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the
aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring …

Abstract Micro-Electro-Mechanical Systems (MEMS) gyroscopes are inertial sensors for the
measurement of angular rates. They have a variety of applications from consumer …

This paper presents the development of an 8-in six-degree-of-freedom (DOF) inertial sensor
based on an advanced capacitive inertial sensor fabrication platform. The platform …