In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

With the development of next-generation wireless communication and sensing technologies,
there is an increasing demand for high-performance and miniaturized resonators …

This paper reports on the design and experimental verification of a new class of thin-film
(250 nm) superhigh-frequency laterally-vibrating piezoelectric microelectromechanical …

An acoustically coupled frequency selective radio frequency (RF) device is provided. The
device includes a piezoelectric substrate overlain by a plurality of electrodes. The device …

In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …

This work reports on piezoelectric aluminum nitride (AlN) based dual-beam RF MEMS
switches that have been monolithically integrated with AlN contour-mode resonators. The …

This paper reports experimental results on single-chip multi-frequency channel-select filters
based on self-coupled piezoelectric aluminum nitride (AlN) contour-mode …

In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al
0.83 Sc 0.17 N as a piezoelectric layer. Moreover, we assess the electromechanical …

This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …

This paper presents and experimentally validates two different approaches to describe the
quality factor (Q) due to anchor losses in 65-MHz aluminum nitride (AlN) contour mode …