β-Ga2O3 material properties, growth technologies, and devices: a review

M Higashiwaki - AAPPS Bulletin, 2022 - Springer
Rapid progress in β-gallium oxide (β-Ga 2 O 3) material and device technologies has been
made in this decade, and its superior material properties based on the very large bandgap …

Critical review of Ohmic and Schottky contacts to β-Ga2O3

LAM Lyle - Journal of Vacuum Science & Technology A, 2022 - pubs.aip.org
Over the last decade, beta-phase gallium oxide (β-Ga2O3) has developed an extensive
interest for applications such as high-power electronics. Due to its ultrawide bandgap of∼ …

A Comprehensive Review on Recent Developments in Ohmic and Schottky Contacts on Ga2O3 for Device Applications

H Sheoran, V Kumar, R Singh - ACS Applied Electronic Materials, 2022 - ACS Publications
Ultrawide bandgap β-gallium oxide (β-Ga2O3) is emerging as a viable candidate for next-
generation high-power electronics, including Schottky barrier diodes (SBDs) and field-effect …

A review of metal–semiconductor contacts for β-Ga2O3

C Lu, X Ji, Z Liu, X Yan, N Lu, P Li… - Journal of Physics D …, 2022 - iopscience.iop.org
Abstract β-Gallium oxide (β-Ga 2 O 3) has been studied extensively in recent decades due
to its excellent usability in fabricating a variety of devices, such as solar-blind photodetectors …

The optimized interface characteristics of β-Ga2O3 Schottky barrier diode with low temperature annealing

YH Hong, XF Zheng, YL He, F Zhang, XY Zhang… - Applied Physics …, 2021 - pubs.aip.org
A low temperature controlled annealing technique was utilized to improve the performance
of vertical β-gallium oxide (β-Ga 2 O 3) Schottky barrier diodes (SBDs) in this work. The …

Control and understanding of metal contacts to β-Ga2O3 single crystals: a review

H Kim - SN Applied Sciences, 2022 - Springer
Abstract Gallium oxide (Ga2O3) is a promising semiconductor for high power devices and
solar blind ultraviolet photodetectors due to its large bandgap, a high breakdown field, and …

[HTML][HTML] Electrical and chemical analysis of Ti/Au contacts to β-Ga2O3

LAM Lyle, TC Back, CT Bowers, AJ Green, KD Chabak… - APL Materials, 2021 - pubs.aip.org
Chemical and electrical measurements of Ti/(010) β-Ga 2 O 3 and Ti/(001) β-Ga 2 O 3
interfaces were conducted as a function of annealing temperature using x-ray photoelectron …

[HTML][HTML] Atomic-scale investigation of γ-Ga2O3 deposited on MgAl2O4 and its relationship with β-Ga2O3

J Tang, K Jiang, C Xu, MJ Cabral, K Xiao, LM Porter… - APL Materials, 2024 - pubs.aip.org
Nominally phase-pure γ-Ga 2 O 3 was deposited on (100) MgAl 2 O 4 within a narrow
temperature window centered at∼ 470 C using metal-organic chemical vapor deposition …

[HTML][HTML] Effect of post-metallization anneal on (100) Ga2O3/Ti–Au ohmic contact performance and interfacial degradation

MH Lee, TS Chou, S Bin Anooz, Z Galazka, A Popp… - APL Materials, 2022 - pubs.aip.org
Here, we investigate the effect of post-metallization anneal temperature on Ti/Au ohmic
contact performance for (100)-oriented Ga 2 O 3. A low contact resistance of∼ 2.49× 10− 5 …

Vertical β-Ga2O3 metal–insulator–semiconductor diodes with an ultrathin boron nitride interlayer

M Xu, A Biswas, T Li, Z He, S Luo, Z Mei, J Zhou… - Applied Physics …, 2023 - pubs.aip.org
In this work, we demonstrate the high performance of β-Ga 2 O 3 metal–insulator–
semiconductor (MIS) diodes. An ultrathin boron nitride (BN) interlayer is directly grown on …