Ion mass and energy selective hyperthermal ion-beam assisted deposition setup
JW Gerlach, P Schumacher, M Mensing… - Review of Scientific …, 2017 - pubs.aip.org
For the synthesis of high-quality thin films, ion-beam assisted deposition (IBAD) is a
frequently used technique providing precise control over several substantial film properties …
frequently used technique providing precise control over several substantial film properties …