This paper provides a literature review on zero defect manufacturing based on the content
analysis performed for 280 research articles published from 1987 to 2018 in a variety of …

Virtual metrology (VM) involves estimating a product's quality directly from production
process data without physically measuring it. This enables the product quality of each unit of …

Among the tenets of Smart Manufacturing (SM) or Industry 4.0 (I4. 0), digital twin (DT), which
represents the capabilities of virtual representations of components and systems, has been …

Abstract The field of Large-Scale Metrology has been studied extensively for many decades
and represents the combination and competition of topics as diverse as geodesy and …

Digital Twin (DT) is one of the key enabling technologies for realizing the promise of Smart
Manufacturing (SM) and Industry 4.0 to improve production systems operation. Driven by the …

Virtual metrology (VM) is drawing more and more attention in the recent research of wafer to
wafer control for semiconductor manufacturing. Although many different approaches for VM …

Virtual metrology (VM) is the prediction of metrology variables (either measurable or non-
measurable) using process state and product information. In the past few years VM has …

Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

In semiconductor manufacturing processes, virtual metrology (VM) has been investigated as
a promising tool to predict important characteristics of products. Although partial least …

In semiconductor manufacturing processes, run-to-run (R2R) control is used to improve
productivity by adjusting process inputs run by run. A process will be controlled based on …