Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

In this paper, we investigate the dynamic behavior of clamped–clamped micromachined
arches when actuated by a small DC electrostatic load superimposed to an AC harmonic …

We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

This paper demonstrates the dependence of temperature coefficient of frequency (TCF) of
silicon micromechanical resonators on charge carrier concentration. TCF compensation is …

A fully monolithic complimentary metal-oxide-semiconductor-microelectormechanical
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …

Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …

Background and objective Here we analyze entropy optimized magnetohydrodynamic flow
of Reiner-Rivlin fluid nanomaterial. Flow by stretched cylinder is induced. Energy expression …

We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …