Dielectric barrier, etch stop, and metal capping materials for state of the art and beyond metal interconnects
SW King - ECS Journal of Solid State Science and Technology, 2014 - iopscience.iop.org
Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …
Atomic layer deposition of solid-state electrolytes for next-generation lithium-ion batteries and beyond: Opportunities and challenges
X Meng - Energy Storage Materials, 2020 - Elsevier
Currently there has an ever-growing interest in inorganic solid-state electrolytes (iSEs),
given the fact that traditional organic liquid electrolytes (oLEs) have become a major limiting …
given the fact that traditional organic liquid electrolytes (oLEs) have become a major limiting …
Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
Interfacial defect vibrations enhance thermal transport in amorphous multilayers with ultrahigh thermal boundary conductance
The role of interfacial nonidealities and disorder on thermal transport across interfaces is
traditionally assumed to add resistance to heat transfer, decreasing the thermal boundary …
traditionally assumed to add resistance to heat transfer, decreasing the thermal boundary …
How metallic protection layers extend the lifetime of NASICON-based solid-state lithium batteries
FJQ Cortes, JA Lewis, J Tippens… - Journal of The …, 2020 - iopscience.iop.org
The use of solid-state electrolytes (SSEs) within batteries is a promising strategy to safely
access the high capacity of lithium metal anodes. However, most SSEs with practical ionic …
access the high capacity of lithium metal anodes. However, most SSEs with practical ionic …
Atomic and molecular layer deposition of alkaLi metal based thin films
M Madadi, J Heiska, J Multia… - ACS Applied Materials & …, 2021 - ACS Publications
Atomic layer deposition (ALD) is the fastest growing thin-film technology in microelectronics,
but it is also recognized as a promising fabrication strategy for various alkali-metal-based …
but it is also recognized as a promising fabrication strategy for various alkali-metal-based …
Atomic layer deposition for lithium‐based batteries
With the increasing demand for energy at a low cost and minimal environmental impact, the
development of next‐generation high‐performance batteries has drawn considerable …
development of next‐generation high‐performance batteries has drawn considerable …
Atomic layer deposition of lithium–nickel–silicon oxide cathode material for thin-film lithium-ion batteries
M Maximov, D Nazarov, A Rumyantsev, Y Koshtyal… - Energies, 2020 - mdpi.com
Lithium nickelate (LiNiO2) and materials based on it are attractive positive electrode
materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of …
materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of …
Studies of the electrochemical behavior of LiNi0. 80Co0. 15Al0. 05O2 electrodes coated with LiAlO2
O Srur-Lavi, V Miikkulainen, B Markovsky… - Journal of The …, 2017 - iopscience.iop.org
In this paper, we studied the influence of LiAlO 2 coatings of 0.5, 1 and 2 nm thickness
prepared by Atomic Layer Deposition onto LiNi 0.8 Co 0.15 Al 0.05 O 2 electrodes, on their …
prepared by Atomic Layer Deposition onto LiNi 0.8 Co 0.15 Al 0.05 O 2 electrodes, on their …
LiAlO2/LiAl5O8 Membranes Derived from Flame-Synthesized Nanopowders as a Potential Electrolyte and Coating Material for All-Solid-State Batteries
E Temeche, S Indris, RM Laine - ACS Applied Materials & …, 2020 - ACS Publications
Recently, γ-LiAlO2 has attracted considerable attention as a coating in Li-ion battery
electrodes. However, its potential as a Li+ ceramic electrolyte is limited due to its poor ionic …
electrodes. However, its potential as a Li+ ceramic electrolyte is limited due to its poor ionic …