Dielectric barrier, etch stop, and metal capping materials for state of the art and beyond metal interconnects

SW King - ECS Journal of Solid State Science and Technology, 2014 - iopscience.iop.org
Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …

Atomic layer deposition of solid-state electrolytes for next-generation lithium-ion batteries and beyond: Opportunities and challenges

X Meng - Energy Storage Materials, 2020 - Elsevier
Currently there has an ever-growing interest in inorganic solid-state electrolytes (iSEs),
given the fact that traditional organic liquid electrolytes (oLEs) have become a major limiting …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Interfacial defect vibrations enhance thermal transport in amorphous multilayers with ultrahigh thermal boundary conductance

A Giri, SW King, WA Lanford, AB Mei… - Advanced …, 2018 - Wiley Online Library
The role of interfacial nonidealities and disorder on thermal transport across interfaces is
traditionally assumed to add resistance to heat transfer, decreasing the thermal boundary …

How metallic protection layers extend the lifetime of NASICON-based solid-state lithium batteries

FJQ Cortes, JA Lewis, J Tippens… - Journal of The …, 2020 - iopscience.iop.org
The use of solid-state electrolytes (SSEs) within batteries is a promising strategy to safely
access the high capacity of lithium metal anodes. However, most SSEs with practical ionic …

Atomic and molecular layer deposition of alkaLi metal based thin films

M Madadi, J Heiska, J Multia… - ACS Applied Materials & …, 2021 - ACS Publications
Atomic layer deposition (ALD) is the fastest growing thin-film technology in microelectronics,
but it is also recognized as a promising fabrication strategy for various alkali-metal-based …

Atomic layer deposition for lithium‐based batteries

L Ma, RB Nuwayhid, T Wu, Y Lei… - Advanced Materials …, 2016 - Wiley Online Library
With the increasing demand for energy at a low cost and minimal environmental impact, the
development of next‐generation high‐performance batteries has drawn considerable …

Atomic layer deposition of lithium–nickel–silicon oxide cathode material for thin-film lithium-ion batteries

M Maximov, D Nazarov, A Rumyantsev, Y Koshtyal… - Energies, 2020 - mdpi.com
Lithium nickelate (LiNiO2) and materials based on it are attractive positive electrode
materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of …

Studies of the electrochemical behavior of LiNi0. 80Co0. 15Al0. 05O2 electrodes coated with LiAlO2

O Srur-Lavi, V Miikkulainen, B Markovsky… - Journal of The …, 2017 - iopscience.iop.org
In this paper, we studied the influence of LiAlO 2 coatings of 0.5, 1 and 2 nm thickness
prepared by Atomic Layer Deposition onto LiNi 0.8 Co 0.15 Al 0.05 O 2 electrodes, on their …

LiAlO2/LiAl5O8 Membranes Derived from Flame-Synthesized Nanopowders as a Potential Electrolyte and Coating Material for All-Solid-State Batteries

E Temeche, S Indris, RM Laine - ACS Applied Materials & …, 2020 - ACS Publications
Recently, γ-LiAlO2 has attracted considerable attention as a coating in Li-ion battery
electrodes. However, its potential as a Li+ ceramic electrolyte is limited due to its poor ionic …