Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

This study introduces a novel image capture and lighting techniques using a cutting-edge
hybrid MEMS scanner system designed for compact microscopic imaging. The scanner …

A silicon micromirror driven by piezoelectric Pb (Zr, Ti) O3 beam actuators has been
demonstrated for two-dimensional (2D) scanning mirror applications. Two devices of similar …

This paper presents the design, fabrication, and characterization of a novel CMOS-
compatible 2-D MEMS scanning mirror based on hybrid actuation mechanisms. Both …

This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror,
which aims to overcome the limitations of conventional microelectromechanical systems …

This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating
structure composed of one magnet and two coils. The mirror-actuating device generates …

Abstract A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic
actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has …

In this paper, we present the design, fabrication and measurement results of a 2D scanning
mirror actuated by 1× 10 piezoelectric Pb (Zr, Ti) O 3 (PZT) cantilever actuators integrated on …

This article provides an updated review of advances in the field of mirror-based laser beam
deflectors, including laser scanners. We propose a taxonomy of these techniques based …