Monolithic multi degree of freedom (MDoF) capacitive MEMS accelerometers
With the continuous advancements in microelectromechanical systems (MEMS) fabrication
technology, inertial sensors like accelerometers and gyroscopes can be designed and …
technology, inertial sensors like accelerometers and gyroscopes can be designed and …
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs
The booming growth in environmental conditions sensing and monitoring pushes the need
of inexpensive environment sensors with small size and low power consumption. The …
of inexpensive environment sensors with small size and low power consumption. The …
A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer
This paper presents a new fabrication approach and design for a three axis capacitive
MEMS accelerometer that is capable of measuring externally applied accelerations in three …
MEMS accelerometer that is capable of measuring externally applied accelerations in three …
Design and analysis of MEMS comb drive capacitive accelerometer for SHM and seismic applications
S Kavitha, RJ Daniel, K Sumangala - Measurement, 2016 - Elsevier
This work presents the design of a MEMS accelerometer that is specifically intended for
Structural Health Monitoring (SHM) applications where sensing low frequency low amplitude …
Structural Health Monitoring (SHM) applications where sensing low frequency low amplitude …
A bulk-micromachined three-axis capacitive MEMS accelerometer on a single die
S Tez, U Aykutlu, MM Torunbalci… - Journal of …, 2015 - ieeexplore.ieee.org
This paper presents a high-performance three-axis capacitive microelectromechanical
system (MEMS) accelerometer implemented by fabricating individual lateral and vertical …
system (MEMS) accelerometer implemented by fabricating individual lateral and vertical …
AlN-on-SOI platform-based micro-machined hydrophone
J Xu, X Zhang, SN Fernando, KT Chai, Y Gu - Applied Physics Letters, 2016 - pubs.aip.org
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …
A three-axis CMOS-MEMS accelerometer structure with vertically integrated fully differential sensing electrodes
MH Tsai, YC Liu, W Fang - Journal of microelectromechanical …, 2012 - ieeexplore.ieee.org
This study presents a novel CMOS-microelectromechanical systems (MEMS) three-axis
accelerometer design using Taiwan Semiconductor Manufacturing Company 0.18-μm one …
accelerometer design using Taiwan Semiconductor Manufacturing Company 0.18-μm one …
An integrated low-noise sensing circuit with efficient bias stabilization for CMOS MEMS capacitive accelerometers
SS Tan, CY Liu, LK Yeh, YH Chiu… - … on Circuits and …, 2011 - ieeexplore.ieee.org
A sensing circuit in 0.35 μm CMOS technology for CMOS MEMS capacitive accelerometers
has been designed in this work with emphasis on managing noise, sensor offset, and the dc …
has been designed in this work with emphasis on managing noise, sensor offset, and the dc …
Analysis and modeling of an 11.8 GHz fin resonant body transistor in a 14 nm FinFET CMOS process
In this work, a compact model is presented for a 14-nm CMOS-based fin resonant body
transistor (fRBT) operating at a frequency of 11.8 GHz and targeting radio frequency (RF) …
transistor (fRBT) operating at a frequency of 11.8 GHz and targeting radio frequency (RF) …
Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer
An ultrasensitive single-axis out-of-plane micro optical electro mechanical system (MOEMS)
accelerometer with a relatively low cross-axis sensitivity based on a designated …
accelerometer with a relatively low cross-axis sensitivity based on a designated …