This paper briefly reviews recent research and developments of micropump designs with a
particular emphasis on mechanical micropumps and summarizes their applications in …

Medical ultrasound has become a crucial part of modern society and continues to play a vital
role in the diagnosis and treatment of illnesses. Over the past decades, the development of …

Piezoelectric and Acoustic Materials for Transducer Applications combines discussion of the
physical properties of piezoelectric and acoustic materials, with the fundamentals, design …

Piezoelectric materials have dominated the ultrasonic transducer technology. Recently,
capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative …

Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive
research for the last two decades. Although they were initially developed for air-coupled …

Capacitive micromachined ultrasonic transducer (MUT) technology is a prime candidate for
next generation imaging systems. Medical and underwater imaging and the nondestructive …

Introduces a new method for fabricating capacitive micromachined ultrasonic transducers
(CMUTs) that uses a wafer bonding technique. The transducer membrane and cavity are …

Capacitive micromachined ultrasonic transducers (CMUTs), introduced about a decade ago,
have been shown to be a good alternative to conventional piezoelectric transducers in …

Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a
candidate to overcome the difficulties in the realization of 2-D arrays for real-time 3-D …

We report on the characterization of 1D arrays of capacitive micromachined ultrasonic
transducers (cMUT). A 275/spl times/5600/spl mu/m 1D CMUT array element is …