Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

We study a novel piezo-driven nanopositioning mechanism in the horizontal plane. For each
horizontal axis, we employ two externally leverage mechanisms with flexure hinges to …

We describe a novel high-bandwidth two degree of freedom microelectromechanical system
nanopositioner. On-chip piezoresistive sensors and four electrostatic actuators are …

This paper presents a novel design and sensitivity analysis of a knife edge-based optical
displacement sensor that can be embedded with nanopositioning stages. The measurement …

We present a comprehensive study of the design, modeling, and characterization of an on-
chip piezoresistive displacement sensor. The design is based on the bulk piezoresistivity of …

Many microelectromechanical systems (MEMS) devices require considerable design effort
to embed their own sensors to monitor themselves. In this study, a MEMS-based vision …

We demonstrate a novel tracking controller formulation based on a linear time-varying
Kalman filter to regulate amplitude and phase of a reference signal independently. The …

This paper describes an input shaping method based on an experimental transfer function to
effectively obtain a desired scan output for an electrostatic microscanner driven in a …

Performance of several readout circuits, when applied to a MEMS-based bulk piezoresistive
displacement sensor is compared in this study. The sensor comprises a pair of tilted …

This paper presents the design, implementation, and control of a novel
microelectromechanical system (MEMS) force sensor. The device features bidirectional …