MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

HT Le, RI Haque, Z Ouyang, SW Lee, SI Fried… - Microsystems & …, 2021 - nature.com
MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

Three-dimensional radio-frequency transformers based on a self-rolled-up membrane platform

W Huang, J Zhou, PJ Froeter, K Walsh, S Liu… - Nature …, 2018 - nature.com
Radio-frequency (RF) integrated circuits are used for wireless communications and require
transformers capable of transferring electrical energy at RF/microwave frequencies …

A 60 mV input voltage, process tolerant start-up system for thermoelectric energy harvesting

M Dezyani, H Ghafoorifard, S Sheikhaei… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
This paper presents a 60 mV input voltage start-up system for thermoelectric energy
harvesting. A new process tolerant inverter cell is proposed, which is functional at supply …

Design and wafer-level fabrication of stacked-type transformers for high-density power converters

C Chen, P Pan, J Gu, M Liu, X Li - IEEE Transactions on Power …, 2024 - ieeexplore.ieee.org
In response to the emerging demands in the miniaturization and integration of power
conversion systems, the stacked-type transformer chips with significantly improved power …

Design considerations for adding series inductors to reduce electromagnetic field interference in an over-coupled WPT system

Y Shin, J Park, H Kim, S Woo, B Park, S Huh, C Lee… - Energies, 2021 - mdpi.com
This paper analyzes how over-coupled coils affect odd harmonic current and
electromagnetic interference (EMI) in a wireless power transfer (WPT) system, and proposes …

MEMS based fabrication of high-frequency integrated inductors on Ni–Cu–Zn ferrite substrates

R Anthony, N Wang, DP Casey, CÓ Mathúna… - Journal of Magnetism …, 2016 - Elsevier
A surface micro-machining process is described to realize planar inductors on ferrite (Ni
0.49 Zn 0.33 Cu 0.18 Fe 2 O 4) for high-frequency applications (< 30 MHz). The highly …

Magnetic integration into a silicon carbide power module for current balancing

Z Miao, Y Mao, GQ Lu, KDT Ngo - IEEE Transactions on Power …, 2019 - ieeexplore.ieee.org
Threshold-voltage mismatch among paralleled dies leads to unbalanced turn-on peak
currents and switching energies, thus degrading reliability. A passive method employing …

MEMS-based vibrational energy harvesting and conversion employing micro-/nano-magnetics

S Roy, D Mallick, K Paul - IEEE Transactions on Magnetics, 2019 - ieeexplore.ieee.org
This paper discusses the current state-of-the-art, ongoing fundamental and technical
challenges and potential roadmaps for micro-scale vibration energy harvesting and power …

Low-power self-oscillating fluxgate current sensor based on Mn-Zn ferrite cores

M Ponjavic, S Veinovic - Journal of Magnetism and Magnetic Materials, 2021 - Elsevier
A low-power open-loop self-oscillating fluxgate current sensor based on Mn-Zn soft ferrites
is proposed in the paper. Differential realization of compensation amplifier, in class-D full …

A 32 mV/69 mV input voltage booster based on a piezoelectric transformer for energy harvesting applications

A Camarda, A Romani, E Macrelli, M Tartagni - Sensors and Actuators A …, 2015 - Elsevier
This paper presents a novel method for battery-less circuit start-up from ultra-low voltage
energy harvesting sources. The approach proposes for the first time the use of a …