Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

Microelectromechanical systems (MEMS) have an unmatched ability to incorporate
numerous functionalities into ultra-compact devices, and due to their versatility and …

MEMS micromirrors have proven to be very important optical devices with applications
ranging from steerable mirrors for switches and cross-connects to spatial light modulators for …

We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The
varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning …

This work presents a variable RF MEMS capacitor based on five cantilever shunt switches
for the first time. Conceptually, the proposed varactor design comprises five identical …

This paper designs and fabricates a MEMS deformable mirror with 61 electrodes driven by
piezoelectric thin films (PZT) to achieve high voltage. This approach effectively corrects …

A confocal laser displacement sensor using a micro-machined varifocal mirror is reported.
The focal length modulation is a key function of the confocal sensor. The mechanism of the …

A 1.2-mm-diameter gold-silicon bimorph varifocal micromirror (VFM) has been designed and
investigated for imaging applications. Several prototypes have been fabricated in a 10-μm …

The sealed cavity pressure of a micro-package often becomes the determining factor of the
performance of an encapsulated micro-electro mechanical system (MEMS). In this study, a …

This paper reports key process technologies for the application of epitaxial polysilicon (epi-
poly-Si) to scanning micromirrors, including low-stress epi-poly-Si deposition, the chemical …