Design and applications of MEMS flow sensors: A review

F Ejeian, S Azadi, A Razmjou, Y Orooji… - Sensors and Actuators A …, 2019 - Elsevier
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Progress in SiC nanowire field-effect-transistors for integrated circuits and sensing applications

K Zekentes, J Choi, V Stambouli, E Bano… - Microelectronic …, 2022 - Elsevier
The advantageous physical properties of bulk Silicon Carbide (SiC) in association with the
anticipated enhancement of specific physical properties in one-dimensional (1D) …

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Y Gao, M Chen, Z Wu, L Yao, Z Tong, S Zhang… - Microsystems & …, 2023 - nature.com
Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …

A 33fJ/Step SAR capacitance-to-digital converter using a chain of inverter-based amplifiers

H Omran, A Alhoshany, H Alahmadi… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
A 12-bit energy-efficient capacitive sensor interface circuit that fully relies on capacitance-
domain successive approximation (SAR) technique is presented. Analysis shows that for …

Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors

M Li, G Qin, C Jia, D Zhang, Z Li, X Han, S Xu… - Microsystems & …, 2024 - nature.com
With the rapid development of various fields, including aerospace, industrial measurement
and control, and medical monitoring, the need to quantify flow velocity measurements is …

Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

HP Phan, T Dinh, T Kozeki, A Qamar, T Namazu… - Scientific reports, 2016 - nature.com
Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS)
applications in harsh environ-ments and bioapplications thanks to its large band gap …

Wall Shear Stress Sensors Based on Carbon Nanotube Pillars

BN Julien, N Holmes, RGS Ghode… - ACS Applied Nano …, 2023 - ACS Publications
Increasingly smaller fluid flow devices depend on increasingly smaller sensors to operate. In
this work, we develop a miniature wall shear stress sensor consisting of a pair of carbon …

Mass analysis of CH4/SO2 gas mixture by low-pressure MEMS gas sensor

MB Gerdroodbary, DD Ganji, I Shiryanpour… - Journal of natural gas …, 2018 - Elsevier
The mass analysis of natural gas for the extraction and separation of the undesirable
component such as sulfur dioxide is significant for industrial applications. In this research …

Near-field electrospinning-enabled direct-write P (VDF-TrFE) nano/micro-fiber-based piezoelectric film for a high-performance airflow sensor

J Hu, J Chen, P Liu, S Fan, W Duan - Sensors and Actuators A: Physical, 2022 - Elsevier
Airflow sensor is a crucial component in many engineering settings, such as sustainable
energy utilization, environmental monitoring, weather forecasting, and aerospace …

Advancements and Applications of Micro and Nanostructured Capacitive Sensors: A Review

V Sakthivelpathi, T Li, Z Qian, C Lee, Z Taylor… - Sensors and Actuators A …, 2024 - Elsevier
Capacitors are essential components in modern electrical systems, functioning primarily to
store electrical charges and regulate current flow. Capacitive sensors, developed in the 20th …