A plasma source for processing or imaging a substrate, for ion source for proton therapy, for
ion thrusters, or for high energy particle accelerators includes a coolant circuit passing …

In a plasma ion Source having an induction coil adjacent to a reactor chamber for inductively
coupling power into the plasma from a radio frequency power Source and designed for …

US8168957B2 - Magnetically enhanced, inductively coupled plasma source for a focused ion
beam system - Google Patents US8168957B2 - Magnetically enhanced, inductively coupled …

4, 859, 908 A 8/1989 Yoshida et al. 4, 870, 284 A 9/1989 Hashimoto et al. 4, 886, 969 A
12/1989 Knauer 4, 935, 623 A 6/1990 Knauer 5, 008, 537 A 4/1991 Toita et al. 5, 019, 712 A …

US8829468B2 - Magnetically enhanced, inductively coupled plasma source for a focused
ion beam system - Google Patents US8829468B2 - Magnetically enhanced, inductively …

An inductively coupled plasma Source for a focused charged particle beam system includes
a dielectric liquid that insulates and cools the plasma chamber. A flow restrictor at an electri …

An inductively-coupled plasma source for a focused charged particle beam system includes
a conductive shield that provides improved electrical isolation and reduced capacitive RF …

HOI. 37/08(2006.01)(57) ABSTRACT HOI. 37/32(2006.01) An inductively-coupled plasma
Source for a focused charged H05H I/28(2006.01) particle beam system includes a …

An inductively-coupled plasma Source for a focused charged particle beam system includes
a plasma chamber and a fluid that is not actively pumped Surrounding the plasma chamber …

Measurement of the disc temperature of a disc brake or the rim temperature of a block brake
at various simulated train brakings is one of the tests carried out at an inertia brake station. In …