Additive manufacturing of metal structures at the micrometer scale

L Hirt, A Reiser, R Spolenak, T Zambelli - Advanced Materials, 2017 - Wiley Online Library
Currently, the focus of additive manufacturing (AM) is shifting from simple prototyping to
actual production. One driving factor of this process is the ability of AM to build geometries …

A critical literature review of focused electron beam induced deposition

WF Van Dorp, CW Hagen - Journal of Applied Physics, 2008 - pubs.aip.org
An extensive review is given of the results from literature on electron beam induced
deposition. Electron beam induced deposition is a complex process, where many and often …

Gas-assisted focused electron beam and ion beam processing and fabrication

I Utke, P Hoffmann, J Melngailis - … of Vacuum Science & Technology B …, 2008 - pubs.aip.org
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

Precursors for direct-write nanofabrication with electrons

S Barth, M Huth, F Jungwirth - Journal of Materials Chemistry C, 2020 - pubs.rsc.org
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …

Focused, nanoscale electron-beam-induced deposition and etching

SJ Randolph, JD Fowlkes, PD Rack - Critical reviews in solid state …, 2006 - Taylor & Francis
Focused electron-beam-induced (FEB-induced) deposition and etching are versatile, direct-
write nanofabrication schemes that allow for selective deposition or removal of a variety of …

Plasmon resonances of silver nanowires with a nonregular cross section

JP Kottmann, OJF Martin, DR Smith, S Schultz - Physical Review B, 2001 - APS
We investigate numerically the spectrum of plasmon resonances for metallic nanowires with
a nonregular cross section, in the 20–50 nm range. We first consider the resonance spectra …

[PDF][PDF] Focused electron beam induced deposition: A perspective

M Huth, F Porrati, C Schwalb… - Beilstein journal of …, 2012 - beilstein-journals.org
Background: Focused electron beam induced deposition (FEBID) is a direct-writing
technique with nanometer resolution, which has received strongly increasing attention within …

Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective

A Botman, JJL Mulders, CW Hagen - Nanotechnology, 2009 - iopscience.iop.org
The creation of functional nanostructures by electron-beam-induced deposition (EBID) is
becoming more widespread. The benefits of the technology include fast'point-and …

[HTML][HTML] Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review

H Plank, R Winkler, CH Schwalb, J Hütner, JD Fowlkes… - Micromachines, 2019 - mdpi.com
Scanning probe microscopy (SPM) has become an essential surface characterization
technique in research and development. By concept, SPM performance crucially depends …

[HTML][HTML] Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical …

I Utke, P Swiderek, K Höflich, K Madajska… - Coordination Chemistry …, 2022 - Elsevier
Nanostructured materials made from group 10 (Ni, Pd, Pt) and group 11 (Cu, Ag, Au)
elements have outstanding technological relevance in microelectronics, nano-optics …