Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

The development of microelectromechanical system (MEMS) processes enables the
integration of capacitive sensors into silicon integrated circuits. These sensors have been …

The presence of the stochastic errors in MEMS (Micro Electro Mechanical Systems)
gyroscopes makes the improvement of the measurement precision challenging. This paper …

Zero bias and scale factor are important overall performance indicators for micromechanical
gyroscopes and are commonly used to describe the temperature stability of MEMS …

This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-
digital converter (DC) that can be used with both liquids and gases. It consists of a …

Bias accuracy of micromachined gyroscope is deteriorated severely when suffering from
unknown environmental disturbances (UD), such as temperature, vibration, and shock. In …

Trans-impedance amplifier (TIA) based capacitance–voltage (C–V) readout circuit is an
attractive choice for micro-machined gyroscope for its simplicity and superior performance …

Scale factor thermal sensitivity is an essential performance index of microelectromechanical
system (MEMS) gyroscopes and is typically used to characterize the temperature stability of …

With the miniaturization of micro-electro-mechanical system (MEMS) gyroscopes, it is
necessary to study their nonlinearity. The phase-frequency characteristics, which affect the …

The performance of microelectromechanical system (MEMS) gyroscopes can be significantly
enhanced by matching the resonance frequencies of the drive and sense mechanical …