[HTML][HTML] A Comprehensive Review of Piezoelectric Ultrasonic Motors: Classifications, Characterization, Fabrication, Applications, and Future Challenges

S Naz, TB Xu - Micromachines, 2024 - mdpi.com
Piezoelectric ultrasonic motors (USMs) are actuators that use ultrasonic frequency
piezoelectric vibration-generated waves to transform electrical energy into rotary or …