Piezoelectric based MEMS acoustic sensor for wide frequency applications
This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
Design and fabrication of piezoelectric MEMS sensor for acoustic measurements
WR Ali, M Prasad - Silicon, 2022 - Springer
This study illustrates the design, modeling and fabrication of a piezoelectric acoustic sensor
based on ZnO to be utilized for aeroacoustic measurements. In aeroacoustics, measurement …
based on ZnO to be utilized for aeroacoustic measurements. In aeroacoustics, measurement …