Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements

AF i Morral, PR i Cabarrocas, C Clerc - Physical Review B, 2004 - APS
The dielectric functions of amorphous and polymorphous silicon films prepared under
various plasma conditions have been deduced from UV-visible spectroscopic ellipsometry …

New approaches for the production of nano‐, micro‐, and polycrystalline silicon thin films

P Roca i Cabarrocas - physica status solidi (c), 2004 - Wiley Online Library
We review current models and propose new approaches for the production of silicon thin
films by low temperature plasma processes. Growth models have often been borrowed from …

Comparison of amorphous silicon absorber materials: Light-induced degradation and solar cell efficiency

M Stuckelberger, M Despeisse, G Bugnon… - Journal of Applied …, 2013 - pubs.aip.org
Several amorphous silicon (a-Si: H) deposition conditions have been reported to produce
films that degrade least under light soaking when incorporated into a-Si: H solar cells …

Synthesis of silicon nanocrystals in silane plasmas for nanoelectronics and large area electronic devices

PR i Cabarrocas, T Nguyen-Tran… - Journal of Physics D …, 2007 - iopscience.iop.org
The synthesis of silicon nanocrystals in standard radio-frequency glow discharge systems is
studied with respect to two main objectives:(i) the production of devices based on quantum …

Controlling the growth of nanocrystalline silicon by tuning negative substrate bias

D Raha, D Das - Solar energy materials and solar cells, 2011 - Elsevier
Application of appropriate dc bias to the substrate has been identified as one of the efficient
parameters, beyond the mostly used classical ones, in controlling the growth of …

The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

E Schüngel, S Mohr, S Iwashita… - Journal of Physics D …, 2013 - iopscience.iop.org
In capacitive hydrogen diluted silane discharges the formation of dust affects plasma
processes used, eg for thin film solar cell manufacturing. Thus, a basic understanding of the …

Toward a better physical understanding of a-Si: H/c-Si heterojunction solar cells

J Damon-Lacoste, P Roca i Cabarrocas - Journal of Applied Physics, 2009 - pubs.aip.org
Despite energy conversion efficiencies exceeding 22%, current understanding of the
physics behind heterojunction solar cells remains incomplete. The role of hydrogen and ion …

Hydrogen-plasma-induced rapid, low-temperature crystallization of μm-thick a-Si: H films

HP Zhou, M Xu, S Xu, LL Liu, CX Liu, LC Kwek… - Scientific reports, 2016 - nature.com
Being a low-cost, mass-production-compatible route to attain crystalline silicon, post-
deposition crystallization of amorphous silicon has received intensive research interest …

Precise morphology control of in-plane silicon nanowires via a simple plasma pre-treatment

Z Xue, W Chen, X Meng, J Xu, Y Shi, K Chen, L Yu… - Applied Surface …, 2022 - Elsevier
Silicon nanowires (SiNWs) are advantageous building blocks to explore a wide range of
high performance nanoelectronics and photonics devices. In-plane solid-liquid-solid (IPSLS) …

Plasma diagnostic approach for high rate nanocrystalline Si synthesis in RF/UHF hybrid plasmas using a PECVD process

BB Sahu, JG Han, KS Shin, K Ishikawa… - Plasma Sources …, 2015 - iopscience.iop.org
Hydrogenated nanocrystalline silicon (nc-Si: H) films intended for efficient nc-Si: H solar
cells are usually made at the transition to the nanocrystalline regime using the plasma …