Design and morphological investigation of high-χ catechol-containing styrenic block copolymers

G Pino, C Cummins, D Mantione, N Demazy… - …, 2022 - ACS Publications
We report the synthesis of multifunctional block copolymers (BCPs) showing a high Flory–
Huggins interaction parameter (χ), which enable sub-10 nm line-space structures for a low …

Isomeric effect enabled thermally driven self-assembly of hydroxystyrene-based block copolymers

C Kanimozhi, M Kim, SR Larson, JW Choi… - ACS Macro …, 2016 - ACS Publications
We demonstrate through isomeric effect the modulation of thermal properties of poly
(hydroxystyrene)(PHS)-based block copolymers (BCPs). A minimal structural change of …

Grapho-epitaxy DSA process with dimension control of template pattern

JA Abdallah, ME Colburn, SJ Holmes, C Liu - US Patent 8,853,085, 2014 - Google Patents
A method for defining a template for directed self-assembly (DSA) materials includes
patterning a resist on a stack including an ARC and a mask formed over a hydrophilic layer …

Template for self assembly and method of making a self assembled pattern

J Kim, WAN Jinxiu, S Miyazaki, G Lin, H Wu - US Patent 10,457,088, 2019 - Google Patents
US10457088B2 - Template for self assembly and method of making a self assembled
pattern - Google Patents US10457088B2 - Template for self assembly and method of …

Grapho-epitaxy DSA process with dimension control of template pattern

JA Abdallah, ME Colburn, SJ Holmes, C Liu - US Patent 9,123,658, 2015 - Google Patents
A method for defining a template for directed self-assembly (DSA) materials includes
patterning a resist on a stack including an ARC and a mask formed over a hydrophilic layer …

Underlayer composition for promoting self assembly and method of making and using

H Wu, J Yin, G Lin, J Kim, J Shan - US Patent 9,093,263, 2015 - Google Patents
US9093263B2 - Underlayer composition for promoting self assembly and method of making and
using - Google Patents US9093263B2 - Underlayer composition for promoting self assembly and …

Underlayer composition for promoting self assembly and method of making and using

Y Yi, J Yin, G Lin - US Patent 9,181,449, 2015 - Google Patents
Disclosed herein is an underlayer composition, wherein the underlayer is typically used for
promoting the formation of self assembled structures, and wherein the underlayer formu …

Compositions of neutral layer for directed self assembly block copolymers and processes thereof

H Wu, Y Cao, SE Hong, J Yin, M Paunescu… - US Patent …, 2015 - Google Patents
The present invention relates to novel processes for using the neutral layer compositions for
aligning microdomains of directed self-assembling block copolymers (BCP). The processes …

Compositions and processes for self-assembly of block copolymers

H Wu, J Kim, J Shan, D Baskaran… - US Patent …, 2021 - Google Patents
The present invention relates to a novel styrenic polymer and to the novel composition
comprised of this polymer and a solvent; wherein the styrenic polymer has a polydispersity …

Polymer compositions for self-assembly applications

H Wu, J Yin, G Lin - US Patent 11,518,730, 2022 - Google Patents
The present invention relates to a composition comprises at least one random copolymer
having at least one repeat unit of structure (1), The present invention also relates to novel …