Piezoelectric materials have dominated the ultrasonic transducer technology. Recently,
capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative …

We report on the characterization of 1D arrays of capacitive micromachined ultrasonic
transducers (cMUT). A 275/spl times/5600/spl mu/m 1D CMUT array element is …

We present the successful fabrication of capacitive micromachined ultrasonic transducers
(CMUTs) with an improved insulation layer structure. The goal is to improve device reliability …

Two-dimensional ultrasound arrays hold great promise for 3-D imaging; however, wiring of
each channel becomes impractical for large arrays or for small-footprint catheter probes for …

This paper reviews ultrasonic transducers that are made by silicon micromachining (MUTs).
Transducers for both air-borne and immersion applications are made from parallel plate …

This paper presents a comprehensive comparison between a collapse-mode and a
conventional-mode capacitive micromachined ultrasonic transducer (CMUT); both devices …

Dual-frequency capacitive micromachined ultrasonic transducers (CMUTs) are introduced
for multiscale imaging applications, where a single array transducer can be used for both …

The study of a micro-electro-mechanical-system (MEMS) based capacitive micromachined
ultrasonic transducer (CMUT) is considered. The characteristics and behavioral studies of …

A simple electromechanical equivalent circuit model is used to predict the behavior of
capacitive micromachined ultrasonic transducers (cMUT). The equivalent circuit model of the …

In this letter, a 400-/spl mu/m/spl times/400-/spl mu/m 2-D capacitive micromachined
ultrasonic transducer (cMUT) array element is experimentally characterised, and the results …