Fully integrated pitch-matched AlScN PMUT-on-CMOS array for high resolution Ultrasound Images

Towards unparallelled CMOS-compatible air-coupled pMUT performance with 30% Sc-doped AlN through an analysis of residual stress effects

J Liu, GD Jian, DSH Chen, DCS Wai… - 2024 IEEE …, 2024 - ieeexplore.ieee.org
Aluminum Nitride (AlN) offers a CMOS-compatible, stable, and lead-free solution for
piezoelectric micromachined ultrasonic transducers (pMUTs), if not for its limited e31, f …
被引用次数：2 相关文章

Dual-Function Multichannel Acoustofluidic Particle Manipulation Enabled by a PMUT Array

J Qian, J Zhang, X Li, L Huang, X Hu… - … on Electron Devices, 2024 - ieeexplore.ieee.org
We have developed a technique of on-chip multisite acoustofluidic manipulation using
aluminum nitride on silicon (AlN-on-Si) piezoelectric micromachined ultrasonic transducers …
相关文章 所有 2 个版本

Curved Cantilever Actuated ScAlN PMUT for Enhanced Linearity and Transmit Sensitivity

S Trivedi, DJ Goh, PC Ramegowda… - 2024 IEEE …, 2024 - ieeexplore.ieee.org
This research introduces a novel curved cantilever-based edge-actuated Piezoelectric
Micromachined Ultrasonic Transducer (PMUT) utilizing a 30% Scandium-doped Aluminum …
相关文章
[PDF] kpi.ua

A Review of Broadband Microfabricated Ultrasonic Systems for Biomedical Applications

РЮ Костюк, СА Найда - Мікросистеми, Електроніка та Акустика, 2024 - elc.kpi.ua
Starting from an overview of historical aspects of biomedical ultrasound development and its
application areas, as well as the brief description of state-of-the art microfabrication …
相关文章